Growth and Doping of Semiconductor Compounds: Kinetics of Incorporation Processes at Kink Sites
It can be inferred from currently available experimental data that specific features of the formation of point defects and nonuniform impurity distribution in thin layers of binary semiconductors result from specific features of the incorporation of host and impurity atoms at kink sites. In particular, statistical correlations between elementary events occurring at step kinks may play an important role in the growth of semiconductor materials by MBE (molecular-beam epitaxy) and CVD (chemical vapor deposition).
KeywordsImpurity Atom Impurity Concentration Cooperative Effect Antisite Defect Host Atom
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