Synopsis
Electro-thermal actuation has a number of advantages in minute mechanical devices such as the ones found in Micro-Electro-Mechanical Systems (MEMS). In this chapter, we describe synthesis methods for a general class of electro-thermal-compliant (ETC) actuators and mechanisms. The ETC devices are similar to the widely used bimorph actuators, but to achieve differential thermal expansion they rely upon their particular shape of a single-material structure rather than mismatched thermal expansion coefficients of two or more materials. These are smart by design because their functionality does not depend on the “smartness” of materials. Determination of the shape of the elastic structure for a specified behavior constitutes the synthesis problem. The synthesis procedure incorporates accurate thermal modeling including convection, which is important at the micro scale due to the familiar scaling law of surface to volume ratio. Design concepts and algorithms, microfabrication procedures, and prototype devices are described in the chapter.
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References
Timoshenko, S., “Analysis of Bi-metal Thermostats,” J. of the Optical Society of America, Vol. 11, 1925, pp. 233–255.
Benecke, W. and Riethmuller, W, 1989, “Applications of Silicon Microactuators Based on Bimorph Structures,” Proceedings of the IEEE MEMS Workshop, Salt Lake City, Utah, Feb. 1989, pp. 116–120.
Takeshima, N. and Fujita, H, 1990, “Polyimide Bimorph Actuators for a Ciliary Motion system,” Micromechanical Sensors, Actuators, and Systems, 1991, pp. 203–209.
Chu, W.-H. and Mehregany, M., 1994, “Microfabricated Tweezers with a Large Griping Force and a Large Range of Motion,” Technical Digest of Solid State Sensors and Actuators Workshop, Hilton Head Island, SC, June 1994, pp. 107–100.
Guckel, H., Klein, J., Christenson, T., Skrobis, K., Laudon, M., and Lovell, E.G., 1992, ‘Thermomagnetic Metal Flexure Actuators,” Technical Digest of Solid State Sensors and Actuators Workshop, Hilton-Head Island, SC, 1992, p 73.
Comtois, J. and Bright, V, 1996, “Surface Micromachined Polysilicon Thermal Actuator Arrays and Applications,” Technical Digest of Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 1996, pp. 174–177.
Lerch, P, Slimane, C.K., Romanwicz, B., and Renaud, P, 1996, “Modelization and characterization of asymmetrical thermal micro-actuators,” J. Micromechanics and Microengineering, Vol. 6, 1996, pp. 134–137
Moulton, T., 1997, “Analysis and design of Electro-Thermal-Compliant micro devices” Center for Sensor Technologies at the university of Pennsylvania technical report #TR-CST31DEC97, pp.13–26.
Keller, C.G. and Howe, R.T., 1997, “Hexsil Tweezers for Teleoperated Micro-Assembly,” Proc. 10th Annual International Workshop on Micro-Electro-Mechanical Systems (MEMS’97), Nagoya, Japan, January 26–30, 1997, pp. 72–77.
Pan, C. S. and Hsu, W., 1997, “An electro-thermally and laterally driven polysilicon microactuator,” J. Micromechanics and Microengineering, 7 (1997), pp. 7–13.
Sigmund, O., “Topology Optimization in Multiphysics Problems,” Proceedings of the 7th AIAA/USAF/NASA/ISSMO Symposium, Vol. 3, St Louis, August 1998, pp. 1492–1500.
Cragun, R. and Howell, L.L., “A Constrained Thermal Expansion Micro-Actuator,” Proceedings of the Micro-Electro-Mechanical Systems (MEMS) Symposium at the International Mechanical Engineering Congress and Exhibition, DSC-Vol. 66, pp. 365–371.
Huang, Q. and Lee, N., “Analysis and Design of Polysilicon Thermal Flexure Actuator,” J. Micromechics and Microengineering., Vol. 9, 1998, pp. 64–70.
Comtois, J. H., Michalicek, M.A., and Barron, C.C., “Electrothermal actuators fabricated in four-level planarized surface micromachined polycrystalline silicon.” Sensors and Actuators A Physical, Vol. 70, 1998, pp 23–31.
Moulton, T. and Ananthasuresh, G.K., “Micromechanical devices with embedded electro-thermal-compliant actuation,” Proceedings of the Micro-Electro-Mechanical Systems (MEMS) Symposium, International Mechanical Engineering Congress and Exposition, Nashville, TN, Nov., 1999, Vol. 1, pp. 553–560.
Moulton, T., “Micromechanical Devices with Embedded Electro-Thermal Actuation,” Masters thesis, Mechanical Engineering and Applied Mechanics, University of Pennsylvania, 2000.
Li, J. and Ananthasuresh, G.K., “Microfabrication and Characterization of Electro-Thermal-Compliant Devices,” CD-ROM proceedings of the ASME 2000 Design Engineering Technical Conferences, Baltimore, Maryland, Sep. 10–13, 2000, paper no. DETC2000/MECH14118.
Moulton, T. and Ananthasuresh, G.K., “Design and Manufacture of Electro-Thermal-Compliant Micro Devices,” Sensors and Actuators, Physical, 90 (2001), pp. 38–48.
Sigmund, O., “Design of Multiphysics Actuators Using Topology Optimization — Part I: One-material structures,” Computer Methods in Applied Mechanics and Engineering, Vol. 190, 2001, pp. 6577–6604.
Sigmund, O., “Design of Multiphysics Actuators Using Topology Optimization -Part II: Two-material structures,” Computer Methods in Applied Mechanics and Engineering, Vol. 190, 2001, pp. 6605–6627.
Lin, L. and Chiao, M., “Electrothermal Responses of Lineshape Microstructures,” Sensors and Actuators, A Physical, Vol. 55, pp. 35–41.
Mankame, N. and Ananthasuresh, G. K., “Comprehensive Thermal Modelling and Characterization of an Electro-Thermal-Compliant Microactuator,” J. Micromechanics and Microengineering, Vol. 11, 2001, pp. 452–462.
Rozvany, G.I.N., Bendsoe, M.P., and Kikuchi, N., 1995, “Layout Optimization of Structures,” ASME Applied Mechanics reviews, Vol. 48, 1995, pp. 41–119.
Bends⌽e, M.P. and Sigmund, O., Topology Optimization: Theory, Methods, and Applications, Springer, Berlin, 2002.
Bends⌽e, M.P. and Sigmund, O, 1999, “Material Interpolations in Topology Optimization,” Arch. Appl. Mech., Vol. 69, pp. 635–654.
Yin, L. and Ananthasuresh, G.K., “Topology Optimization of Compliant Mechanisms with Multiple Materials Using a Peak Function Material Interpolation Scheme,” Structural and Multidisciplinary Optimization, Vol. 23, No. 1, 2001, pp. 49–62.
Yin, L. and Ananthasuresh, G.K., “Novel Design Technique for Electro-Thermally Actuated Compliant Micromechanisms,” Sensors and Actuators, A Physical, Vol. 97–98, 2002, pp. 599–609.
Kovacs, G., Micromachined Transducers, WC McGraw-Hill, New York, 1998.
Mankame, N. and Ananthasuresh, G.K., “Topology Synthesis of Electrothermal Compliant (ETC) Mechanisms Using Line Elements,” CD-ROM Proceedings of 2001 ASME Design Engineering Technical Conferences, Design Automation Conference, Pittsburgh, PA, Sep. 9–11, 2001, paper #. DETC2001/DAC-21019. 12 pages. To also appear in Structural and Multidsciplinary Optimization in 2003.
Saxena, A. and Ananthasuresh, G.K., “On an Optimal Property of Compliant Topologies,” Structural and Multidisciplinary Optimization, Vol. 19, No. 1, 2000, pp. 36–49.
Cook, R.D., Malkus, D.S., and Plesha, M.E., Concepts and Applications of Finite Element Analysis, Third edition, John Wiley & Sons, New York, 1989.
Hafkta, R.T. and Gurdal, Z., Elements of Structural Optimization, Kluwer Academic Publishers, New York, 1992.
Que, L., Park, J., and Gianchandani, Y., “Bent-beam Electro-thermal Actuators for High-Force Applications,” Proceedings of IEEE Microelectromechanical Systems conference, 1999, pp. 31–36.
Jonsmann, J., Sigmund, O., and Bouwstra, S., “Multi Degrees of Freedom Electro-Thermal Microactuators,” Proceedings of Transducers, 1999, pp. 1372–1375.
Li, J., Koh, S. K., Ananthasuresh, G. K., Ayyaswamy, P. S., and Ananthakrishnan, P., 2001, “A Novel Attitude Control Technique for Miniature Spacecraft,” Proc. of MEMS symposium at 2001 ASME International Mechanical Engineering Conference and Exposition, Nov. 2001, New York.
Koh, S.K., Ostrowski, J.P., and Ananthasuresh, G.K. “Control of Micro-satellite Orientation Using Bounded-Input, Fully-Reversed, MEMS Actuators.” International Journal of Robotics Research, Vol. 21, No. 5–6, 2002, pp.591–605.
Chen, L., 2001, “Microfabrication of Heterogeneous Optimized Compliant Mechanisms,” SUNFEST Technical Report, Center for Sensor Technology, University of Pennsylvania, Dec. 2001.
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Ananthasuresh, G.K. (2003). Synthesis Methods for Electro-Thermal Actuation. In: Optimal Synthesis Methods for MEMS. Microsystems, vol 13. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-0487-0_4
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DOI: https://doi.org/10.1007/978-1-4615-0487-0_4
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