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Optical Emission Spectroscopy

  • Francis F. Chen
  • Jane P. Chang

Abstract

Optical emission from a plasma occurs primarily through the electron impact excitation of atoms or molecules to an excited state, followed by a relaxation to a lower energy state releasing a photon containing an energy equal to the difference between these two energy states. Analysis of the photon energy (wavelength of light) and spectral emission information of species can therefore be used to infer the composition of the species that produced it.

Keywords

Optical Emission Optical Emission Spectroscopy Electron Energy Distribution Function Electron Distribution Function Plasma Diagnostics 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media New York 2003

Authors and Affiliations

  • Francis F. Chen
    • 1
  • Jane P. Chang
    • 2
  1. 1.Electrical Engineering DepartmentUniversity of CaliforniaLos AngelesUSA
  2. 2.Chemical Engineering DepartmentUniversity of CaliforniaLos AngelesUSA

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