Heavy Particle Collisions
Resonant and non-resonant charge transfer
Resonant charge transfer is important in producing fast neutrals and slow ions, that would modify the overall chemical reactivity of plasma towards the surface.
A+ + A → A + A+
Non-resonant charge transfer can take place between unlike atoms/molecules or between an atom and a molecule.
A+ + B → A + B+
Figure 11 shows the non-resonant charge transfer between N+ and O, while several non-resonant eharge transfer reactions between oxygen molecule and atom are important in an oxygen plasma.