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Heavy Particle Collisions

  • Francis F. Chen
  • Jane P. Chang

Abstract

The collisions between ion-ion, ion-neutral, and neutral-neutral are heavy particle collisions. These species all have much lower temperatures compared to the electrons, thus move much slower compared to the electrons. The important heavy particle collisions are:
  1. 1.

    Resonant and non-resonant charge transfer

    Resonant charge transfer is important in producing fast neutrals and slow ions, that would modify the overall chemical reactivity of plasma towards the surface.

    A+ + A → A + A+

    Non-resonant charge transfer can take place between unlike atoms/molecules or between an atom and a molecule.

    A+ + B → A + B+

    Figure 11 shows the non-resonant charge transfer between N+ and O, while several non-resonant eharge transfer reactions between oxygen molecule and atom are important in an oxygen plasma.

     

Keywords

Atomic Collision Electron Attachment Rotational Energy Level Repulsive State Electronegative Plasma 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Copyright information

© Springer Science+Business Media New York 2003

Authors and Affiliations

  • Francis F. Chen
    • 1
  • Jane P. Chang
    • 2
  1. 1.Electrical Engineering DepartmentUniversity of CaliforniaLos AngelesUSA
  2. 2.Chemical Engineering DepartmentUniversity of CaliforniaLos AngelesUSA

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