Abstract
In this chapter, we summarize the current status of the field of oxide/semiconductor epitaxy and try to anticipate where this fascinating technology will go next. As improvements are made in oxide on semiconductor epitaxy the question becomes, what can we do with these oxides on semiconductor systems? The electronic properties of complex oxides by themselves have been the subject of extensive research in a field known as oxide electronics. We hope to show how this technology can enable large-scale integration of oxide electronic and photonic devices, including possible hybrid semiconductor/oxide systems. There is incredible potential in the realization of multifunctional devices and monolithic heterogeneous integration of materials and devices with a multitude of exciting opportunities for oxides for decades to come.
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Demkov, A.A., Posadas, A.B. (2014). Outlook and Parting Thoughts. In: Integration of Functional Oxides with Semiconductors. Springer, New York, NY. https://doi.org/10.1007/978-1-4614-9320-4_9
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