Skip to main content
SpringerLink
Log in

Techniques to Control Thin-Film Textures

  • Chapter
  • First Online:
RHEED Transmission Mode and Pole Figures

  • 1442 Accesses

Abstract

In the last chapter, we discussed some possible origins of texture formation during growth, in particular, the selection of out-of-plane and in-plane crystal orientations when the flux is obliquely incident to the substrate. The exact angle of orientation depends on the incident flux angle. It has been shown that texture orientation as well as the morphology of the films can be controlled by dynamically varying the incident flux direction during deposition (He and Zhao, Nanoscale 3:2361–2375, 2011; Hawkeye and Brett, J. Vac. Sci. Technol. A 25:1317–1335, 2007; Karabacak and Lu, Handbook of Theoretical and Computational Nanotechnology, 729–779, 2005). This opens up endless possibilities for tailoring the desired texture for different applications. In this chapter, we will describe some of the strategies reported recently.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
eBook
USD 16.99
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 109.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD 109.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

References

  • Abelmann, L., Lodder, C.: Oblique evaporation and surface diffusion. Thin Solid Films. 305, 1–21 (1997)

    Article  Google Scholar 

  • Alouach, H., Mankey, G.J.: Texture orientation of glancing angle deposited copper nanowire arrays. J. Vac. Sci. Technol. A 22, 1379–1382 (2004a)

    Article  Google Scholar 

  • Alouach, H., Mankey, G.J.: Epitaxial growth of copper nanowire arrays grown on H-terminated Si(110) using glancing-angle deposition. J. Mater. Res. 19(12), 3620–3625 (2004b)

    Article  Google Scholar 

  • Chen, L., Lu, T.-M., Wang, G.-C.: Biaxially textured Mo films with diverse morphologies by substrate-flipping rotation. Nanotechnology. 22(50), 505701–7 (2011)

    Article  Google Scholar 

  • Chen, L., Lu, T.-M., Wang, G.-C.: Incident flux angle induced crystal texture transformation in nanostructured molybdenum films. J. Appl. Phys. 112, 024303–8 (2012)

    Article  Google Scholar 

  • Chen, L., Andrea, L., Timalsina, Y.P., Wang, G.-C., Lu, T.-M.: Engineering epitaxial-nanospiral metal films using dynamic oblique angle deposition. J. Cryst. Growth Des. 13, 2075–2080 (2013)

    Article  Google Scholar 

  • Chudzik, M.P., Koritala, R.E., Luo, L.P., Miller, D.J., Balachandran, U., Kannewurf, C.R.: Mechanism and processing dependence of biaxial texture development in magnesium oxide thin films grown by inclined-substrate deposition. IEEE Trans. Appl. Supercond. 11, 3469–3472 (2001)

    Google Scholar 

  • Gaire, C., Snow, P., Chan, T.-L., Yuan, W., Riley, M., Liu, Y., Zhang, S.B., Wang, G.-C., Lu, T.-M.: Morphology and texture evolution of nanostructured CaF2 films on amorphous substrates under oblique incidence flux. Nanotechnology. 21, 445701-1-9 (2010)

    Article  Google Scholar 

  • Hawkeye, M.M., Brett, M.J.: Narrow bandpass optical filters fabricated with one-dimensionally periodic inhomogeneous thin films. J. Appl. Phys. 100, 044322-1-7 (2006)

    Article  Google Scholar 

  • Hawkeye, M.M., Brett, M.J.: Glancing angle deposition: fabrication, properties, and applications of micro- and nanostructured thin films. J. Vac. Sci. Technol. A 25, 1317–1335 (2007)

    Google Scholar 

  • He, Y.-P., Zhao, Y.-P.: Advanced multi-component nanostructures designed by dynamic shadowing growth. Nanoscale. 3, 2361–2375 (2011)

    Article  MathSciNet  Google Scholar 

  • Jensen, M.O., Brett, M.J.: Porosity engineering in glancing angle deposition thin films. Appl. Phys. A: Mater. Sci. Process. 80, 763–768 (2005)

    Google Scholar 

  • Karabacak, T., Lu, T.-M.: Shadowing growth and physical self-assembly of 3D columnar structures. In: Rieth, M., Schommers, W. (eds.) Handbook of theoretical and computational nanotechnology, vol. 9, pp. 729–779. American Scientific Publishers, Stevenson Ranch (2005). (Nanocomposites, Nano-Assemblies, Nanosurfaces, Chap. 69)

    Google Scholar 

  • Krishnan, R., Parker, T., Lee, S., Lu, T.-M.: The formation of vertically aligned biaxial tungsten nanorods using a novel shadowing growth technique. Nanotechnology. 20, 465609-1-6 (2009)

    Article  Google Scholar 

  • Krishnan, R., Riley, M., Lee, S., Lu, T.-M.: Formation of biaxially textured molybdenum thin films under the influence of recrystallization conditions. Thin Solid Films. 519, 5429–5432 (2011a)

    Article  Google Scholar 

  • Krishnan, R., Riley, M., Lee, S., Lu, T.-M.: Vertically aligned biaxially textured molybdenum thin films. J. Appl. Phys. 110, 064311-1-5 (2011b)

    Article  Google Scholar 

  • Laermans, C., Michiels, L., De Bock, A.: Reflection electron diffraction study of oblique textures in CdS thin films produced by electron bombardment evaporation. Thin Solid Films. 15, 317–324 (1973)

    Article  Google Scholar 

  • LaForge, J.M., Ingram, G.L., Taschuk, M.T., Brett, M.J.: Flux engineering to control in-plane crystal and morphological orientation. Cryst. Growth Des. 12, 3661–3667 (2012)

    Article  Google Scholar 

  • Li, H.-F., Kar, A.K., Parker, T., Wang, G.-C., Lu, T.-M.: The morphology and texture of Cu nanorod films grown by controlling the directional flux in physical vapor deposition. Nanotechnology. 19, 335708-1-8 (2008)

    Article  Google Scholar 

  • Malhotra, A.K., Yalisove, S.M., Bilello, J.C.: Origin of in-plane texture in sputtered Mo films. Mat. Res. Soc. Symp. Proc. 403, 33–38 (1996)

    Google Scholar 

  • Okamoto, K., Itoh, K.: Incidence angle dependences of columnar grain structure and texture in obliquely deposited iron films. Jpn. J. Appl. Phys. 44, 1382–1388 (2005)

    Article  Google Scholar 

  • Robbie, K., Sit, J.C., Brett, M.J.: Advanced techniques for glancing angle deposition. J. Vac. Sci. Technol. B16, 1115–1122 (1998)

    Article  Google Scholar 

  • Schulz, U., Terry, S.G., Levi, C.G.: Microstructure and texture of EB-PVD TBCs grown under different rotation modes. Mat. Sci. Eng. A-Struct. 360, 319–329 (2003)

    Article  Google Scholar 

  • Shetty, A.R., Karimi, A., Cantoni, M.: Effect of deposition angle on the structure and properties of pulsed-DC magnetron sputtered TiAlN thin films. Thin Solid Films. 519, 4262–4270 (2011)

    Article  Google Scholar 

  • Shim, Y., Amar, J.G.: Effects of shadowing in oblique-incidence metal (100) epitaxial growth. Phys. Rev. Lett. 98(4), 046103-1-4 (2007)

    Article  Google Scholar 

  • Tang, T., Gaire, C., Ye, D.-X., Karabacak, T., Lu, T.-M., Wang, G.-C.: AFM, SEM and in situ RHEED study of Cu texture evolution on amorphous carbon by oblique angle vapor deposition. Phys. Rev. B, 72, 035430-1-8 (2005)

    Article  Google Scholar 

  • van der Drift: Evolutionary selection, a principle governing growth orientation in vapour-deposited layers. Philips Res. Repts. 22, 267–288 (1967)

    Google Scholar 

  • van Dijken, S., Jorritsma, L.C., Poelsema, B.: Grazing-incidence metal deposition: Pattern formation and slope selection. Phys. Rev. B 61(20), 14047–14058 (2000)

    Article  Google Scholar 

  • Wang, P.I., Li, H.-F., Lu, T.-M.: Orientation modulated epitaxy of Cu nanorods on Si(100) substrate. IEEE Trans. Nanotechnol. 11(3), 542–545 (2012)

    MathSciNet  Google Scholar 

  • Ye, D.-X., Karabacak, T., Lim, B.K., Wang, G.-C., Lu, T.-M.: Growth of uniformly aligned nanorod arrays by oblique angle deposition with two-phase substrate rotation. Nanotechnology. 15, 817–821 (2004)

    Article  Google Scholar 

  • Ye, D.-X., Karabacak, T., Picu, R.C., Wang, G.-C., Lu, T.-M.: Uniform Si nanostructures grown by oblique angle deposition with substrate swing rotation. Nanotechnology. 16, 1717–1723 (2005)

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Dept of Phys., Applied Phys., and Astro., Rensselaer Polytechnic Institute, Troy, New York, USA

    Gwo-Ching Wang

  2. Dept. of Phys., Applied Phys., and Astro, Rensselaer Polytechnic Institute, Troy, New York, USA

    Toh-Ming Lu

Authors
  1. Gwo-Ching Wang
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Toh-Ming Lu
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Gwo-Ching Wang .

Rights and permissions

Reprints and permissions

Copyright information

© 2014 Springer Science+Business Media New York

About this chapter

Cite this chapter

Wang, GC., Lu, TM. (2014). Techniques to Control Thin-Film Textures. In: RHEED Transmission Mode and Pole Figures. Springer, New York, NY. https://doi.org/10.1007/978-1-4614-9287-0_9

Download citation

  • DOI: https://doi.org/10.1007/978-1-4614-9287-0_9

  • Published:

  • Publisher Name: Springer, New York, NY

  • Print ISBN: 978-1-4614-9286-3

  • Online ISBN: 978-1-4614-9287-0

  • eBook Packages: EngineeringEngineering (R0)

Publish with us

Policies and ethics

Search

Navigation