Abstract
In this introduction, a short historical background of electron diffraction, especially reflection high-energy electron diffraction (RHEED) and its major applications in molecular beam epitaxy (MBE) growth, is briefly discussed. Then the early work on texture films using RHEED transmission mode and the recent development of RHEED pole figure analysis for textured films are introduced. The importance of the finite inelastic mean free path (IMFP) of electrons in RHEED is emphasized.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
Bauer, E.: Low energy electron microscopy. Rep. Prog. Phys. 57(9), 895–938 (1994)
Braun, W.: Applied RHEED: reflection high-energy electron diffraction during crystal growth (Springer tracts in modern physics). Springer, Heidelberg (1999)
Davisson, C., Germer, L.: Diffraction of electrons by a crystal of nickel. Phys. Rev. 30, 705–740 (1927)
Dobson, P. J., Joyce, B. A., Neave, J. H.: Current understanding and applications of the RHEED intensity oscillation technique. J. Cryst. Growth. 81, 1–8 (1987)
Gehrenbeck, R. K.: Electron diffraction: fifty years ago. Physics Today, p 34 (January 1978)
Gries, W. H.: A universal predictive equation for the inelastic mean free path lengths of x-ray photoelectrons and Auger electrons. Surf. Interface Anal. 24, 38–50 (1996)
Harris, J. J., Joyce, B. A., Dobson, P. J.: Oscillation in the surface structure of Sn-doped GaAs during growth by MBE. Surf. Sci. 103(1), L90–L96 (1981)
Horn, M., Gotter U., Henzler, M.: Low energy electron diffraction investigation of Si molecular-beam epitaxy onto Si(100). J. Vac. Sci. Technol. B 6(2), 727–730 (1988)
Ichimiya, A., Cohen, P. I.: Reflection high-energy electron diffraction. Cambridge University Press, New York (2004)
Larsen, P. K., Dobson, P. J.: Reflection high-energy electron diffraction and reflection electron imaging of surfaces. NATO Science Series B: Physics, vol. 188, Plenum Press, New York (1988)
Lu, T.-M., Wang, G.-C., Zhao, Y.-P.: Beyond intensity oscillations. Surf. Rev. Lett. 5 (3 and 4), 899–912 (1998)
Powell, C. J., Jablonski, A.: Evaluation of calculated and measured electron inelastic mean free paths near solid surfaces. J. Phys. Chem. Ref. Data. 28, 19–62 (1999)
Powell, C. J., Jablonski A.: Evaluation of electron inelastic mean free paths for selected elements and compounds. Surf. Interface Anal. 29, 208–214 (2000)
Powell, C. J., Jablonski, A.: NIST Electron Inelastic-Mean-Free-Path Database-Version 1.2. National Institute of Standards and Technology, Gaithersburg, MD (2010)
Tang, F., Wang, G.-C., Lu, T.-M.: Surface pole figures by reflection high-energy electron diffraction. Appl. Phys. Lett. 89, 241903–3 (2006)
Tang, F., Parker, T., Wang, G.-C., Lu, T.-M.: Surface texture evolution of polycrystalline and nanostructured films: RHEED surface pole figure analysis. J. Phys. D: Appl. Phys. 40, R427–R439 (2007)
Tanuma, S., Powell, C. J., Penn, D. R.: Calculations of electron mean free path. V. Data for 14 organic compounds over the 50–2000 eV range. Surf. Interface Anal. 21, 165–176 (1994)
Tanuma, S., Powell, C. J., Penn, D. R.: Calculations of electron inelastic mean free paths. IX. Data for 41 elemental solids over the 50 eV to 30 keV range. Surf. Interface Anal. 43, 689–713 (2011)
Tromp, R. M., Hannon, J. B., Ellis, A. W., Wan, W., Berghaus, A., Schaff, O.: A new aberration-corrected, energy-filtered LEEM/PEEM instrument. I. Principles and design. Ultramicroscopy, 110(7), 852–861 (2010)
Wang, Z. L.: Reflection electron microscopy and spectroscopy for surface analysis. Cambridge University Press, New York (1996)
Yang, H.-N., Wang, G.-C., Lu, T.-M.: Quantitative study of the decay of intensity oscillation in transient layer-by-layer growth. Phys. Rev. B 51, 17932–17945 (1995)
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
Copyright information
© 2014 Springer Science+Business Media New York
About this chapter
Cite this chapter
Wang, GC., Lu, TM. (2014). Introduction. In: RHEED Transmission Mode and Pole Figures. Springer, New York, NY. https://doi.org/10.1007/978-1-4614-9287-0_1
Download citation
DOI: https://doi.org/10.1007/978-1-4614-9287-0_1
Published:
Publisher Name: Springer, New York, NY
Print ISBN: 978-1-4614-9286-3
Online ISBN: 978-1-4614-9287-0
eBook Packages: EngineeringEngineering (R0)