Abstract
A concise review of X-ray diffraction (XRD) and reflectivity (XRR) analytical methods is presented. Basic concepts required for proper data acquisition and interpretation are introduced with several graphs and diagrams: X-ray scattering and diffraction processes, the concept of atomic interspacing d, Bragg’s law, reciprocal space and Ewald sphere. The key features from conventional XRD results are discussed, in combination with a review of modern instrument configurations, proper choice of optics and types of sample and detector scans. Powder diffraction analysis methods are presented by using a walk-through practical example: search/match phase analysis, preferred orientation, crystallite/grain size estimation, structure determination and Rietveld refinement method. Extensive discussion of thin film analysis by XRD and XRR is presented with focus on texture, lattice mismatch, strain relaxation and defects. High resolution reciprocal lattice mapping is presented in detail including discussion of a complex layered structure. Finally, XRR methods are presented with focus on thin film, density and roughness determination. Strength and limitations of each method are presented in comparison with competing analytical techniques.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
He BB (2011) Two-dimensional X-ray diffraction. Wiley, Hoboken, NJ
Suryanarayana C, Norton MG (1998) X-ray diffraction—a practical approach. Plenum, New York, NY
Warren BE (1990) X-ray diffraction. Dover Publications, Dover, NY
Pecharsky VK, Zavalij PY (2003) Fundamentals of powder diffraction and structure characterization of materials. Kluwer Academic Press, New York, NY
Birkholz M (2006) Thin films analysis by X-ray scattering. Wiley-VCH, Weinheim
Fewster P (2001) X-ray scattering from semiconductors. Imperial College, London
Buhrke VE, Jenkins R, Smith DK (1998) A practical guide for the preparation of specimens for X-ray fluorescence and X-ray diffraction analysis. Wiley-VCH, New York, NY
Dr. Kabekkodu S (ed) (2010) ICDD PDF-4+ 2010 (database). International Centre for Diffraction Data, Newtown Square, PA
Balzar D (1999) Voigt-function model in diffraction line-broadening analysis. In: Snyder RL, Bunge HJ, Fiala J (eds) Defect and microstructure analysis from diffraction, International Union of Crystallography Monographs on Crystallography No. 10. Oxford University Press, New York, NY, pp 94–126
Young RA (ed) (2000) The Rietveld method. Oxford Press, Oxford
Shin C-S, Kim Y-W, Gall D, Greene JE, Petrov I (2002) Phase composition and microstructure of polycrystalline and epitaxial TaN x layers grown on oxidized Si(001) and MgO(001) by reactive magnetron sputter deposition. Thin Solid Films 402:172–182
Lotgering FK, Inorg J (1959) Topotactical reactions with ferrimagnetic oxides having hexagonal crystal structures—I. J Inorg Nucl Chem 9:113–123
Engler O, Randle V (2012) Introduction to texture analysis: macrotexture, microtexture, and orientation mapping. CRC Press, Boca Raton, FL
Sardela MR, Hanson GV (1995) Thermal relaxation kinetics of strained Si/Si 1−x Ge x heterostructures determined by direct measurement of mosaicity and lattice parameter variations. J Vac Sci Tech A 13:314
Chason E, Mayer TM (1997) Thin film and surface characterization by specular X-ray reflectivity. Crit Rev Solid State Mater Sci 22:1–67
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2014 Springer Science+Business Media New York
About this chapter
Cite this chapter
Sardela, M.R. (2014). X-Ray Diffraction and Reflectivity. In: Sardela, M. (eds) Practical Materials Characterization. Springer, New York, NY. https://doi.org/10.1007/978-1-4614-9281-8_1
Download citation
DOI: https://doi.org/10.1007/978-1-4614-9281-8_1
Published:
Publisher Name: Springer, New York, NY
Print ISBN: 978-1-4614-9280-1
Online ISBN: 978-1-4614-9281-8
eBook Packages: Chemistry and Materials ScienceChemistry and Material Science (R0)