Abstract
The design of a typical piezoresistive sensor is specified by at least a dozen separate parameters, such as bias voltage and piezoresistor length. Design optimization is the process of selecting the single most optimal design from this enormous parameter space by employing models to predict device performance for each unique combination of design parameters. Piezoresistor design is complicated by the large number of design parameters and degree of nonlinear coupling between the parameters, design constraints and overall performance. This chapter will summarize the basic design tradeoffs and present numerical optimization as a robust approach to designing optimized piezoresistive sensors.
We would like to thank Nahid Harjee and Sung-Jin Park for extensive discussions on design optimization and their contributions to the concepts presented in this chapter.
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© 2013 Springer Science+Business Media New York
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Doll, J.C., Pruitt, B.L. (2013). Design Optimization. In: Piezoresistor Design and Applications. Microsystems and Nanosystems, vol 1. Springer, New York, NY. https://doi.org/10.1007/978-1-4614-8517-9_6
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DOI: https://doi.org/10.1007/978-1-4614-8517-9_6
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Publisher Name: Springer, New York, NY
Print ISBN: 978-1-4614-8516-2
Online ISBN: 978-1-4614-8517-9
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