Innovative Designs for Quartz Crystal Microbalance
Quartz crystal microbalance (QCM) is a piezoelectric sensor with multiple application such as antigen-antibody interactions, detection of virus capsids, protein adsorption, and DNA and RNA hybridization. The material of QCM model with diameter of 4.5mm in this research is AT-cut quartz since the resonance mode of AT-cut crystal is thickness-shear mode (TSM). The principle of QCM is sensing the change of resonance frequency caused by the variation of mass. Based on the theory of electricity, decreasing the separation distance and expanding the effective area of electric field are feasible solutions for improving QCM. According to these concepts, novel groove designs for QCM with gold electrodes were proposed to develop electric field distribution. Complete analysis for piezoelectricity and electricity of QCM was simulated via analysis software CoventorWare 2010. The analysis results reveal that innovative designs in this research fulfill the advantages such as larger effective area, lower crystal impedance, and higher quality factor.
KeywordsResonator QCM AT-cut CoventorWare Piezoelectric Sensor
We are grateful to the National Center for High-Performance Computing for computer time and facilities. This research is supported by National Science Council in Taiwan (Project No. NSC 100-2221-E-018 -032 -).
- 2.Nakazawa M (1981) Force and acceleration frequency effects in grooved and ring supported resonators. In: Annual frequency control symposium, USAERADCOM, Ft. Monmouth, NJ C7733Google Scholar
- 3.Vig JR, LeBus JW, Filler RL (1977) Chemically polished quartz. In: Proceedings of the 31st annual frequency control symposium, Springfield, 1977, pp 131–143Google Scholar
- 7.Martin SJ, Frye GC, Ricco AJ (1993) Effect of surface roughness on the response of thickness-shear mode resonators in liquids. J Am Chem Soc 65:2910–2922Google Scholar
- 10.Zong-Han Liu, Chih-Hsiung Shen (2012) New groove structures for miniature quartz crystal microbalance with low crystal impedance. Adv Mater Res 538–541:2461–2465Google Scholar