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A Hybrid Control Approach to Nanopositioning

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Smart Materials-Based Actuators at the Micro/Nano-Scale

Abstract

Precise position control on the nanometer and subnanometer scale, referred to as nanopositioning, is a key enabler for nanoscale science and engineering. In nanopositioning, feedback control is essential to meet the stringent requirements on accuracy, stability, and repeatability in the presence of model uncertainties and environmental disturbances. In this chapter, we review a new hybrid control approach to nanopositioning which is based on the combination of a continuous-time control law with impulsive modifications of the controller states. By using impulsive control, the limitations of conventional linear controllers can be overcome, such as the inherent trade-off between closed-loop bandwidth and resolution. We review the related literature, present an in-depth analysis of the stability and performance characteristics of impulsive control, and verify the theoretical conclusions experimentally using a custom-built atomic force microscope.

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Acknowledgements

We thank Urs Egger and Walter Häberle for their support with the mechanical and electronic hardware used in the experiments. Special thanks go to Haris Pozidis and Evangelos Eleftheriou for their support of this work.

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Authors and Affiliations

  1. IBM Research - Zurich, 8803, Rüschlikon, Switzerland

    Tomas Tuma, Abu Sebastian & Angeliki Pantazi

  2. ETH Zurich, 8092, Zürich, Switzerland

    Tomas Tuma & John Lygeros

Authors
  1. Tomas Tuma
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  2. Abu Sebastian
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  3. John Lygeros
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  4. Angeliki Pantazi
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Corresponding author

Correspondence to Abu Sebastian .

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Editors and Affiliations

  1. at Besancon, Automatic &, University of Franche-Comté, 24, rue Alain Savary, Besancon, 25000, France

    Micky Rakotondrabe

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Tuma, T., Sebastian, A., Lygeros, J., Pantazi, A. (2013). A Hybrid Control Approach to Nanopositioning. In: Rakotondrabe, M. (eds) Smart Materials-Based Actuators at the Micro/Nano-Scale. Springer, New York, NY. https://doi.org/10.1007/978-1-4614-6684-0_5

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  • DOI: https://doi.org/10.1007/978-1-4614-6684-0_5

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