Abstract
This chapter presents the design of piezoelectric actuators by using the performances inclusion theorem (PIT). The main objective is to seek for the dimensions of a cantilevered actuator such that its performances will lie within some specifications imposed a priori. For that, these specifications are transcribed into an interval transfer function, called interval reference model, while an interval model of the actuator is also provided. Then, from the PIT, a problem of finding the dimensions is yielded such that this latter model is enclosed in the reference model. The problem is seen as a set-inversion problem that can be solved with interval tools such as the SIVIA (Set Inversion Via Interval Analysis) algorithms. The designed piezoelectric actuator is afterwards fabricated and characterized. The experimental characterizations demonstrate the efficiency of the proposed technique.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
A. Bergander, W. Driesen, T. Varidel, M. Meizoso, J.M. Breguet, Mobile cm3-microrobots with tools for nanoscale imaging and micromanipulation, in Mechatronics & Robotics (MechRob 2004), Aachen, Germany, 13–15 Sept 2004, pp. 1041–1047
S. Fatikow, T. Wich, H. Hulsen, T. Sievers, M. Jahnisch, Microrobot system for automatic nanohandling inside a scanning electron microscope. IEEE/ASME Trans. Mechatron. 12(3), 244–252 (2007)
M. Rakotondrabe, Y. Haddab, P. Lutz, Development, modeling, and control of a micro/ nanopositioning 2-DOF stick-slip device. IEEE/ASME Trans. Mechatron. 14(6), 733–745 (2009)
Physikinstrumente, Selection guide: linear flexure stages and actuators/nanopositioning systems, http://www.physikinstrumente.com/en/products/nanopositioning/nanopositioning_linear-stage_selection.php (2012)
K. Uchino, Piezoelectric ultrasonic motors: overview. Smart Mater. Struct. 7(3), 273–285 (1998)
R. Lee, H.L. Li, Development and characterization of a rotary motor driven by anisotropic piezoelectric composite laminate. Smart Mater. Struct. 7(3), 327–336 (1998)
S.H. Jun, S.M. Lee, S.H. Lee, H.E. Kim, K.W. Lee, Piezoelectric linear motor with unimorph structure by co-extrusion process. Sens. Act. A. 147(1), 300–303 (2008)
G. Binnig, C.F. Quate, Ch. Gerber. Atomic force microscope. Phys. Rev. Lett. 56(9), 930 (1986)
R. Perez, J. Agnus, C. Clevy, A. Hubert, N. Chaillet, Modeling, fabrication and validation of a high performance 2-DOF piezoactuator for micromanipulation. IEEE/ASME Trans. Mechatron. 10(2), 161–171 (2005)
M. Rakotondrabe, A. Ivan, Development and dynamic modeling of a new hybrid thermo-piezoelectric micro-actuator. IEEE Trans. Robot. 26(6), 1077–1085 (2010)
M. Grossard, C. Rotinat-Libersa, N. Chaillet, M. Boukallel, Mechanical and control-oriented design of a monolithic piezoelectric microgripper using a new topological optimization method. IEEE/ASME Trans. Mechatron. 1(14), 32–45 (2009)
M. Rakotondrabe, Performances inclusion for stable interval systems, in ACC (American Control Conference), San Francisco CA, USA, June–July 2011, pp. 4367–4372
R.E. Moore, Interval Analysis (Prentice-Hall, Englewood Cliffs, 1966)
L. Jaulin, M. Kieffer, O. Didrit, E. Walter, Applied Interval Analysis (Springer, London, 2001)
M. Rakotondrabe, Piezoelectric Cantilevered Structures: Modeling, Control, and Measurement/Estimation Aspects (Springer, Berlin 2013)
R.G. Ballas, Piezoelectric Multilayer Beam Bending Actuators: Static and Dynamic Behavior and Aspects of Sensor Integration (Springer, Berlin, 2007)
L. Jaulin, E. Walter, Set inversion via interval analysis for nonlinear bounded-error estimation. Automatica 29(4), 1053–1064 (1993)
Acknowledgements
This work is supported by the national ANR-JCJC C-MUMS-project (National young investigator project ANR-12-JS03007.01: Control of Multivariable Piezoelectric Microsystems with Minimization of Sensors).
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2013 Springer Science+Business Media New York
About this chapter
Cite this chapter
Rakotondrabe, M., Khadraoui, S. (2013). Design of Piezoelectric Actuators with Guaranteed Performances Using the Performances Inclusion Theorem. In: Rakotondrabe, M. (eds) Smart Materials-Based Actuators at the Micro/Nano-Scale. Springer, New York, NY. https://doi.org/10.1007/978-1-4614-6684-0_3
Download citation
DOI: https://doi.org/10.1007/978-1-4614-6684-0_3
Published:
Publisher Name: Springer, New York, NY
Print ISBN: 978-1-4614-6683-3
Online ISBN: 978-1-4614-6684-0
eBook Packages: EngineeringEngineering (R0)