Abstract
Design of nonlinear proof mass suspensions is one among several possible strategies that can be adopted to enlarge the operating frequency range of energy harvesters. Emphasizing continuous mode operation, this chapter gives a brief overview of the working principles of electrostatic energy harvesters. We argue that nonlinear springs are particularly well suited to make nonlinear suspensions for MEMS electrostatic energy harvesters. We then discuss from a theoretical point of view how nonlinear springs will modify the vibration spectrum of the devices and what can be expected from them in terms of performance. Different nonlinear spring designs are presented together with recent experimental results on characterization of micromachined devices. With frequency sweeps or white-noise vibration, nonlinear devices have shown dramatic increases in bandwidth compared to their linear counterparts. Experiments with band-limited noise show that the use of nonlinear springs is a viable method to increase the harvester tolerance towards variations in vibration bandwidth and center frequency.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Similar content being viewed by others
References
Burrow S, Clare L (2007) 2007 IEEE International electric machines drives conference, IEMDC ’07, vol. 1. Antalya, Turkey, pp. 715–720
Burrow SG, Clare LR, Carrella A, Barton D (2008) Proc SPIE 6928:692807
Zhu D, Tudor MJ, Beeby SP (2010) Meas Sci Technol 21:022001
Soliman MSM, Abdel-Rahman EM, El-Saadany EF, Mansour RR (2008) J Micromech Microeng 18(115021):11p
Blystad LC, Halvorsen E (2011) Microsyst Technol 17:505
Matsumoto K, Saruwatari K, Suzuki Y (2011) In: PowerMEMS 2011, Seoul, The Republic of Korea, pp. 134–137
Liu H, Tay CJ, Quan C, Kobayashi T, Lee C (2011) J Microelectromech Syst 20:1131
Marinkovic B, Koser H (2009) Appl Phys Lett 94:103505
Marzencki M, Defosseux M, Basrour S (2009) J Microelectromech Syst 18:1444
Tvedt LGW, Nguyen DS, Halvorsen E (2010) J Microelectromech Syst 19:305. DOI 10.1109/JMEMS.2009.2039017
Stanton SC, McGehee CC, Mann BP (2009) Appl Phys Lett 95:174103
Cottone F, Vocca H, Gammaitoni L (2009) Phys Rev Lett 102:080601
Erturk A, Hoffmann J, Inman DJ (2009) Appl Phys Lett 94:254102
Barton DAW, Burrow SG, Clare LR (2010) J Vib Acoust 132:021009
Nguyen DS, Halvorsen E, Jensen GU, Vogl A (2010) J Micromech Microeng 20:125009. DOI 10.11088/0960-1317/20/12/125009
Nguyen SD, Tran NHT, Halvorsen E, Paprotny I (2011) In: Power MEMS 2011, Seoul, Republic of Korea, pp. 126–129
Löhndorf M, Kvisterøy T, Westby E, Halvorsen E (2007) In: PowerMEMS 2007 Technical Digest, Freiburg, pp. 331–334
Westby ER, Halvorsen E (2011) IEEE/ASME Trans Mechatronics 17:995. DOI 10.1109/TMECH.2011.2151203
Miller LM, Halvorsen E, Dong T, Wright PK (2011) J Micromech Microeng 21:045029.DOI 10.1088/0960-1317/21/4/045029
von Buren T, Mitcheson PD, Green TC, Yeatman EM, Holmes AS, Tröster G (2006) IEEE Sensor J 6:28
Blystad LCJ, Halvorsen E, Husa S (2010) IEEE Trans Ultrason Ferroelectr Freq Contr 57:908
Halvorsen E, Blystad LCJ, Husa S, Westby E (2007) In: International Conference on Perspective Technologies and Methods in MEMS Design, 2007. MEMSTECH 2007, pp. 117–122
Halvorsen E (2008) J Microelectromech Syst 17:1061
van Kampen NG (2007) Stochastic processes in physics and chemistry. Elsevier, Amsterdam
Gardiner CW (2004) Handbook of stochastic methods, 3rd edn. Springer, Berlin-Heidelberg
Kloeden PE, Platen E (2010) Numerical solution of stochastic differential equations. Springer, Berlin-Heidelberg
Blystad LCJ, Halvorsen E (2011) Smart Mater Struct 20:025011
Sebald G, Kuwano H, Guyomar D, Ducharne B (2011) Smart Mater Struct. 20:075022
Bao MH (2000) Micro Mechanical transducers: pressure sensors, accelerometers, and gyroscopes. Elsevier B.V., Amsterdam
Roundy S, Wright PK, Rabaey J (2003) Comput Commun 26:1131
Hoffmann D, Folkmer B, Manoli Y (2011) J Micromech Microeng 21:104002
Bartsch U, Gaspar J, Paul O (2010) J Micromech Microeng 20:035016
Meninger S, Mur-Miranda JO, Amirtharajah R, Chandrakasan A, Lang J (1999) In: ISLPED ’99: Proceedings of the 1999 international symposium on low power electronics and design. ACM, New York, pp. 48–53
Mitcheson P, Sterken T, He C, Kiziroglou M, Yeatman E, Puers R (2008) Meas Contr UK 41:114
Yen BC, Lang JH (2006) IEEE Trans Circ Syst I 53:288
Kuehne I, Frey A, Marinkovic D, Eckstein G, Seidel H (2008) Sensor Actuator A 142:263
Ma W, Zhu R, Rufer L, Zohar Y, Wong M (2007) J Microelectromech Syst 16:29
Li Y, Cheng Z, San H, Duo Y, Chen X (2010) In: 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems. NEMS 2010, pp. 78–83
Suzuki Y (2011) IEEJ Trans Electr Electron Eng 6:101
Sessler GM (ed) (1999) Electrets, 3rd edn. Laplacian Press, California
Tsutsumino T, Suzuki Y, Kasagi N, Kashiwagi K, Morizawa Y (2006) In: PowerMEMS 2006 technical digest, Berkeley, USA, pp. 279–282
Sakane Y, Suzuki Y, Kasagi N (2008) J Micromech Microeng 18:104011
Sterken T, Baert K, Puers R, Borghs G, Mertens R (2003) In: Proceedings pan pacific microelectronics symposium, Hawaii, pp. 27–34
Gracewski SM, Funkenbusch PD, Jia Z, Ross DS, Potter MD (2006) J Micromech Microeng 16:235
Yamashita K, Honzumi M, Hagiwara K, Iguchi Y, Suzuki Y (2010) In: Proceedings of PowerMEMS 2010 oral presentations, Leuven, Belgium, pp. 165–168
Halvorsen E, Westby ER, Husa S, Vogl A, Østbø NP, Leonov V, Sterken T, Kvisterøy T (2009) In: The 15th international conference on solid-state sendors, actuators & microsystems, transducers 2009, Denver, Colorado, pp. 1381–1384
Soliman M, Abdel-Rahman E, El-Saadany E, Mansour R (2009) J Microelectromech Syst 18:1288
Le CP, Halvorsen E (2011) In: Proceedings of the 22nd micromechanics and microsystem technology europe workshop, Tønsberg, Norway
D’hulst R, Sterken T, Puers R, Deconinck G, Driesen J (2010) IEEE Trans Ind Electron 57:4170
Peano F, Tambosso T (2005) J Microelectromech Syst 14:429
Galayko D, Basset P (2011) IEEE Trans Circ Syst I 58:299
Mahmoud MAE, Abdel-Rahman EM, El-Saadany EF, Mansour RR (2010) Smart Mater Struct 19:025007
Risken H (1996) The Fokker–Planck equation: methods of solutions and applications. Springer series in synergetics, vol. 18, 2nd edn. Springer, New York
Rao SS (2004) Mechanical vibrations, Pearson Education, New Jersey
Kovacic I, Brennan MJ (eds) (2011) The duffing equation. Wiley, Chichester, West Sussex
Thomson WT, Dahleh MD (1998) Theory of vibration with applications, 5th edn. Prentice Hall, Upper Saddle River, New Jersey
Senturia SD (2001) Microsystem design, Kluwer Academic Publishers, Norwell, Massachusetts
Voigtländer K, Risken H (1985) J Stat Phys 40:397
Mitcheson PD, Yeatman EM, Rao GK, Holmes AS, Green TC (2008) Proc IEEE 96:1457
Renno JM, Daqaq MF, Inman DJ (2009) J Sound Vib 320:386
Ramlan R, Brennan M, Mace B, Kovacic I (2010) Nonlinear Dynam 59:545
Scruggs J (2009) J Sound Vib 320:707
Jutte CV, Kota S (2008) J Mech Des 130:081403
Krylov S, Bernstein Y (2006) Sensor Actuator Phys 130–131:497
Tran NHT, Nguyen SD, Halvorsen E (2011) In: Proceedings of the 22nd micromechanics and microsystem technology Europe workshop, Tønsberg, Norway
Tran NHT (2011) Design of nonlinear springs for MEMS vibration energy harvesting applications. Master’s thesis, Vestfold University College
Nguyen SD, Halvorsen E (2011) J Microelectromech Syst 20:1225. DOI 10.1109/JMEMS. 2011.2170824.
Halvorsen E (2012) Fundamental issues in nonlinear wide-band vibration energy harvesting (unpublished), arXiv:1209.3184
Acknowledgements
This work was supported by the Research Council of Norway under grant no. 191282.
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2013 Springer Science+Business Media New York
About this chapter
Cite this chapter
Halvorsen, E., Nguyen, S.D. (2013). MEMS Electrostatic Energy Harvesters with Nonlinear Springs. In: Elvin, N., Erturk, A. (eds) Advances in Energy Harvesting Methods. Springer, New York, NY. https://doi.org/10.1007/978-1-4614-5705-3_3
Download citation
DOI: https://doi.org/10.1007/978-1-4614-5705-3_3
Published:
Publisher Name: Springer, New York, NY
Print ISBN: 978-1-4614-5704-6
Online ISBN: 978-1-4614-5705-3
eBook Packages: EnergyEnergy (R0)