Advances in Energy Harvesting Methods

pp 417-435


Materials and Devices for MEMS Piezoelectric Energy Harvesting

  • Miso KimAffiliated withDepartment of Materials and Science, Massachusetts Institute of TechnologyDivision of Industrial Metrology, Center for Safety Measurement, Korea Research Institute of Standards and Science Email author 
  • , Seung-Hyun KimAffiliated withSchool of Engineering, Brown University
  • , Seungbum HongAffiliated withMaterials Science Division and Center for Nanoscale Materials, Argonne National Laboratory

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Piezoelectric vibration energy harvesters (PVEHs) for microelectromechanical systems (MEMS) have received considerable attention as an enabling technology for self-powered wireless sensor networks. MEMS-PVEHs are particularly attractive because of the potential to deliver power required for sensor nodes and their ability to be integrated concurrently with the microfabrication of electronic circuits such as sensor nodes. This chapter consists of four subsections, starting with Sect. 17.1, where various piezoelectric materials commonly used for MEMS-scale PVEHs are reviewed. Typical device configurations of PVEH systems are introduced in Sect. 17.2, followed by analytical modeling of different configurations in Sect. 17.3 to link material characteristics to device performance: standard capacitor type electrodes for {3–1} mode of operation and interdigitated electrodes (IDTEs) for {3–3} mode of operation. In the last section, fabrication and characterization of MEMS-scale PVEHs in both of these modes are presented with model–experiment comparisons.