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Metal Oxide Nanomaterials for Chemical Sensors pp 189–224Cite as

Synthesis of Metal Oxide Nanomaterials for Chemical Sensors by Molecular Beam Epitaxy

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Abstract

In order to develop next generation chemical sensors using nano-scale materials, we need to understand the sensing mechanisms at atomic level. This requires synthesizing chemical sensing materials with controlled structure, chemical composition and surface morphology. Although the commonly used wet chemical synthesis methods provide quality materials for large-scale production of materials, alternative thin film deposition techniques such as sputtering, chemical vapor deposition (CVD), and molecular beam epitaxy (MBE) can also be useful to achieve atomic-scale control over the structure and composition over a large fabrication area for potential device fabrication as well as to gain an understanding of the chemical sensing properties of nano-scale materials. Especially, MBE has been used to synthesize metal oxide thin films with ultra-pure, well-ordered surfaces, which can be used to understand the effect of surface morphology, structure, and composition on the gas sensing properties. In this chapter, we provide a detailed discussion of thin film growth using MBE along with some in situ characterization capabilities such as reflection high energy electron diffraction (RHEED) and low energy electron diffraction (LEED). In addition, this chapter focuses on the discussion of the growth, characterization and gas sensing properties of metal oxide thin films such as doped CeO2 and SnO2. The chapter also emphasizes the significance of various in situ and ex situ characterization techniques to understand the material properties there by developing methodologies to synthesize better materials with tunable characteristics for sensing applications.

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Acknowledgments

A portion of this research was performed using EMSL, a national scientific user facility sponsored by the Department of Energy’s Office of Biological and Environmental Research and located at Pacific Northwest National Laboratory (PNNL). PNNL is operated for the U.S. DOE by Battelle Memorial Institute under contract number DE-AC05-76RL01830.

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Authors and Affiliations

  1. EMSL, Pacific Northwest National Laboratory, Richland, WA, 99354, USA

    Manjula I. Nandasiri & Suntharampillai Thevuthasan

  2. Department of Physics, Western Michigan University, Kalamazoo, MI, 49008, USA

    Manjula I. Nandasiri

  3. Battelle Science and Technology India, Pune, MH, 411057, India

    Satyanarayana V. N. T. Kuchibhatla

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  1. Manjula I. Nandasiri
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  2. Satyanarayana V. N. T. Kuchibhatla
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  3. Suntharampillai Thevuthasan
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Correspondence to Suntharampillai Thevuthasan .

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  1. College of Nanoscale Science &, Engineering, State University of New York, Albany, Fuller Road 255, Albany, 12203, New York, USA

    Michael A. Carpenter

  2. Inst. Anorganische Chemie, Universität Köln, Greinstraße 6, Köln, 50923, Germany

    Sanjay Mathur

  3. , Department of Physics, Southern Illinois University, Lincoln Drive 1245, Carbondale, 62901, Illinois, USA

    Andrei Kolmakov

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Nandasiri, M.I., Kuchibhatla, S.V.N.T., Thevuthasan, S. (2013). Synthesis of Metal Oxide Nanomaterials for Chemical Sensors by Molecular Beam Epitaxy. In: Carpenter, M., Mathur, S., Kolmakov, A. (eds) Metal Oxide Nanomaterials for Chemical Sensors. Integrated Analytical Systems. Springer, New York, NY. https://doi.org/10.1007/978-1-4614-5395-6_6

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