Abstract
Nanomaterials are becoming increasingly important for next-generation chemical sensing devices. In particular, quasi-one-dimensional materials, such as nanowires, are attracting a great deal of interest. While early examples have demonstrated the promise offered by these nanoscale materials, challenges still remain for integration, systematic characterization and evaluation of such materials in operational devices. Here, a means to assess the performance of nanowire-based materials as chemical microsensors is illustrated with two examples. Polycrystalline nanowire sensing materials are integrated with microsensor substrates that feature an embedded heater, facilitating the use of temperature to interrogate the response characteristics of sensing materials. By changing the operating temperature, different effects are observed as a function of nanowire loading density (aligned tin oxide nanowires) or overall material morphology (tungsten oxide materials, including a thin film). Further, by using conventional signal processing and data analysis approaches, the sensitivity and selectivity of these materials as a function of material scale and morphology are characterized.
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References
Choi KJ, Jang HW (2010) One-dimensional oxide nanostructures as gas-sensing materials: review and issues. Sensors 10(4):4083–4099
Kolmakov A, Moskovits M (2004) Chemical sensing and catalysis by one-dimensional metal-oxide nanostructures. Annu Rev Mater Res 34:151–180
Comini E, Sberveglieri G (2010) Metal oxide nanowires as chemical sensors. Mater Today 13(7–8):28–36
Franke ME, Koplin TJ, Simon U (2006) Metal and metal oxide nanoparticles in chemiresistors: does the nanoscale matter? Small 2:36–50
Benkstein KD, Martinez CJ, Li G, Meier DC, Montgomery CB, Semancik S (2006) Integration of nanostructured materials with MEMS microhotplate platforms to enhance chemical sensor performance. J Nanopart Res 8:809–822
Comini E (2006) Metal oxide nano-crystals for gas sensing. Anal Chim Acta 568(1–2):28–40
Donthu S, Alem N, Pan Z, Li S-Y, Shekhawat G, Dravid V, Benkstein KD, Semancik S (2008) Directed fabrication of ceramic nanostructures on fragile substrates using soft-electron beam lithography (soft-eBL). IEEE Trans Nanotech 7(3):338–343
Evoy S, DiLello N, Deshpande V, Narayanan A, Liu H, Riegelman M, Martin BR, Hailer B, Bradley JC, Weiss W, Mayer TS, Gogotsi Y, Bau HH, Mallouk TE, Raman S (2004) Dielectrophoretic assembly and integration of nanowire devices with functional CMOS operating circuitry. Microelectron Eng 75(1):31–42
Fan ZY, Ho JC, Takahashi T, Yerushalmi R, Takei K, Ford AC, Chueh YL, Javey A (2009) Toward the development of printable nanowire electronics and sensors. Adv Mater 21(37):3730–3743
Li XP, Chin E, Sun HW, Kurup P, Gu ZY (2010) Fabrication and integration of metal oxide nanowire sensors using dielectrophoretic assembly and improved post-assembly processing. Sens Actuators B 148(2):404–412
Chen PC, Shen GZ, Zhou CW (2008) Chemical sensors and electronic noses based on 1-D metal oxide nanostructures. IEEE Trans Nanotech 7(6):668–682
Semancik S, Xiang X-D, Takeuchi I (2003) Temperature-dependent materials research with micromachined array platforms. In combinatorial materials synthesis. Marcel Dekker, Inc., New York, pp 263–295
Taylor CJ, Semancik S (2002) Use of microhotplate arrays as microdeposition substrates for materials exploration. Chem Mater 14:1671–1677
Benkstein KD, Semancik S (2006) Mesoporous nanoparticle TiO2 thin films for conductometric gas sensing on microhotplate platforms. Sens Actuators B 113(1):445–453
Cavicchi RE, Walton RM, Aquino-Class M, Allen JD, Panchapakesan B (2001) Spin-on nanoparticle tin oxide for microhotplate gas sensors. Sens Actuators B Chem 77:145–154
Martinez CJ, Hockey B, Montgomery CB, Semancik S (2005) Porous tin oxide nanostructured microspheres for sensor applications. Langmuir 21:7937–7944
Benkstein KD, Raman B, Lahr DL, Bonevich JE, Semancik S (2009) Inducing analytical orthogonality in tungsten oxide-based microsensors using materials structure and dynamic temperature control. Sens Actuators B 137(1):48–55
Fort A, Mugnaini M, Rocchi S, Vignoli V, Comini E, Faglia G, Ponzoni A (2010) Metal-oxide nanowire sensors for CO detection: characterization and modeling. Sens Actuators B 148(1):283–291
Sysoev VV, Goschnick J, Schneider T, Strelcov E, Kolmakov A (2007) A gradient microarray electronic nose based on percolating SnO2 nanowire sensing elements. Nano Lett 7:3182–3188
Barth S, Hernandez-Ramirez F, Holmes JD, Romano-Rodriguez A (2010) Synthesis and applications of one-dimensional semiconductors. Prog Mater Sci 55(6):563–627
Chun JY, Lee JW (2010) Various synthetic methods for one-dimensional semiconductor nanowires/nanorods and their applications in photovoltaic devices. Eur J Inorg Chem 27:4251–4263
Wu XJ, Zhu F, Mu C, Liang YQ, Xu LF, Chen QW, Chen RZ, Xu DS (2010) Electrochemical synthesis and applications of oriented and hierarchically quasi-1D semiconducting nanostructures. Coord Chem Rev (9-10):1135–1150
Meulenkamp EA (1997) Mechanism of WO3 electrodeposition from peroxy-tungstate solution. J Electrochem Soc 144(5):1664–1671
Yamanaka K, Oakamoto H, Kidou H, Kudo T (1986) Peroxotungstic acid coated films for electrochromic display devices. Jpn J Appl Phys 25(9):1420–1426
Certain commercial equipment, instruments, or materials are identified in this document. Such identification does not imply recommendation or endorsement by the National Institute of Standards and Technology, nor does it imply that the products identified are necessarily the best available for the purpose
Colton RJ, Rabalais JW (1976) Electronic structure to tungsten and some of its borides, carbides, nitrides, and oxides by x-ray electron spectroscopy. Inorg Chem 15(1):236–238
Tian ML, Wang JG, Snyder J, Kurtz J, Liu Y, Schiffer P, Mallouk TE, Chan MHW (2003) Synthesis and characterization of superconducting single-crystal Sn nanowires. Appl Phys Lett 83(8):1620–1622
Kolmakov A, Zhang YX, Moskovits M (2003) Topotactic thermal oxidation of Sn nanowires: intermediate suboxides and core-shell metastable structures. Nano Lett 3(8):1125–1129
Lee AF, Lambert RM (1998) Oxidation of Sn overlayers and the structure and stability of Sn oxide films on Pd(111). Phys Rev B 58(7):4156
Wang D, Miller AC, Notis MR (1996) XPS study of the oxidation behavior of the Cu3Sn intermetallic compound at low temperatures. Surf Interface Anal 24(2):127–132
Cox DF, Fryberger TB, Semancik S (1988) Oxygen vacancies and defect electronic states on the SnO2(110)-1 × 1 surface. Phys Rev B 38(3):2072
Suehle JS, Cavicchi RE, Gaitan M, Semancik S (1993) Tin oxide gas sensor fabricated using CMOS micro-hotplates and in situ processing. IEEE Electron Device Lett 14(3):118–120
Semancik S, Cavicchi RE, Gaitan M, Suehle JS (1994) Temperature-controlled micromachined arrays for chemical sensor fabrication and operation. US Patent 5 345 213, 6 Sept 1994
Semancik S, Cavicchi RE (1998) Kinetically controlled chemical sensing using micromachined structures. Acc Chem Res 31:279–287
Lucci M, Regoliosi R, Reale A, Di Carlo A, Orlanducci S, Tamburri E, Terranova ML, Lugli P, Di Natale C, D’Amico A, Paolesse R (2005) Gas sensing using single wall carbon nanotubes ordered with dielectrophoresis. Sens Actuators B 111:181–186
Shi L, Yu CH, Zhou JH (2005) Thermal characterization and sensor applications of one-dimensional nanostructures employing microelectromechanical systems. J Phys Chem B 109(47):22102–22111
Sysoev VV, Schneider T, Goschnick J, Kiselev I, Habicht W, Hahn H, Strelcov E, Kolmakov A (2009) Percolating SnO2 nanowire network as a stable gas sensor: direct comparison of long-term performance versus SnO2 nanoparticle films. Sens Actuators B 139(2):699–703
Berven CA, Dobrokhotov V, McIlroy DN, Chava S, Abdelrahaman R, Heieren A, Dick J, Barredo W (2008) Gas sensing with mats of gold-nanoparticle decorated GaN nanowires. IEEE Sens J 8(5–6):930–935
Deb B, Desai S, Sumanasekera GU, Sunkara MK (2007) Gas sensing behaviour of mat-like networked tungsten oxide nanowire thin films. Nanotechnol 18(28):285501
Kim ID, Jeon EK, Choi SH, Choi DK, Tuller HL (2010) Electrospun SnO2 nanofiber mats with thermo-compression step for gas sensing applications. J Electroceram 25(2–4):159–167
Kunt TA, McAvoy TJ, Cavicchi RE, Semancik S (1998) Optimization of temperature programmed sensing for gas identification using micro-hotplate sensors. Sens Actuators B 53(1-2):24–43
Barsan N, Tomescu A (1995) The temperature-dependence of the response of SnO2-based gas-sensing layers to O-2, Ch4, and Co. Sens Actuators B 26(1-3):45–48
Cavicchi RE, Suehle JS, Kreider KG, Gaitan M, Chaparala P (1996) Optimized temperature-pulse sequences for the enhancement of chemically specific response patterns from micro-hotplate gas sensors. Sens Actuators B 33(1–3):142–146
Gaggiotti G, Galdikas A, Kaciulis S, Mattogno G, Setkus A (1995) Temperature dependencies of sensitivity and surface chemical-composition of Snox gas sensors. Sens Actuators B 25(1-3):516–519
Gutierrez-Osuna R, Gutierrez-Galvez A, Powar N (2003) Transient response analysis for temperature-modulated chemoresistors. Sens Actuators B 93(1–3):57–66
Duda R, Hart PE, Stork DG (2000) Pattern classification. Wiley-Interscience, New York
Raman B, Hertz JL, Benkstein KD, Semancik S (2008) Bioinspired methodology for artificial olfaction. Anal Chem 80(22):8364–8371
Rogers PH, Semancik S (2011) Feedback-enabled discrimination enhancement for temperature-programmed chemiresistive microsensors. Sens Actuators B 158(1):111–116
Prades JD, Jimenez-Diaz R, Hernandez-Ramirez F, Cirera A, Romano-Rodriguez A, Morante JR (2010) Harnessing self-heating in nanowires for energy efficient, fully autonomous and ultra-fast gas sensors. Sens Actuators B 144(1):1–5
Acknowledgments
We acknowledge C. S. Mungle for assistance in the dielectrophoretic alignment of the tin nanowires and the technical assistance of C.B. Montgomery in preparing the microsensor platforms and packaging. B. Raman was supported by a NIH–NIST Joint Postdoctoral Associateship Award and D. L. Lahr was supported by a NIST Postdoctoral Associateship Award, both administered through the National Research Council.
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Benkstein, K.D., Raman, B., Lahr, D.L., Semancik, S. (2013). Evaluation of Metal Oxide Nanowire Materials With Temperature-Controlled Microsensor Substrates. In: Carpenter, M., Mathur, S., Kolmakov, A. (eds) Metal Oxide Nanomaterials for Chemical Sensors. Integrated Analytical Systems. Springer, New York, NY. https://doi.org/10.1007/978-1-4614-5395-6_14
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DOI: https://doi.org/10.1007/978-1-4614-5395-6_14
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