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Interface Circuits for MEMS Microphones

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Nyquist AD Converters, Sensor Interfaces, and Robustness

Abstract

This paper presents an overview of interface circuits for capacitive MEMS microphones. The interface circuits and the building blocks are analyzed in detail, highlighting the most important design issues and trade-offs. Moreover, two design examples are reported, including circuit details and experimental results. The first example is based on a conventional constant-charge approach, while the second introduces the force-feedback concept. Both examples are implemented in a 0.35-μm CMOS technology and achieve a signal-to-noise and distortion ratio larger than 60 dB with a power consumption of about 1 mW from a 3.3-V power supply.

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Author information

Authors and Affiliations

  1. Department of Industrial and Information Engineering, Department of Electrical Engineering, University of Pavia, Via Ferrata 1, Pavia, 27100, Italy

    Piero Malcovati

  2. Department of Electrical Engineering, University of Pavia, Pavia, Italy

    Marco Grassi

  3. Department of Physics, University of Milano Bicocca, Milano, Italy

    Andrea Baschirotto

Authors
  1. Piero Malcovati
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  2. Marco Grassi
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  3. Andrea Baschirotto
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Corresponding author

Correspondence to Piero Malcovati .

Editor information

Editors and Affiliations

  1. , Electrical Engineering, Eindhoven University of Technology, Building/room: Pt 5.08, Eindhoven, 5600, Netherlands

    Arthur H.M. van Roermund

  2. , Department of Physics, University of Milan-Bicocca, Milan, Italy

    Andrea Baschirotto

  3. , Dept. Elektrotechniek, K.U.Leuven, Kardinaal Mercierlaan 94, HEVERLEE, B-3001, Belgium

    Michiel Steyaert

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Malcovati, P., Grassi, M., Baschirotto, A. (2013). Interface Circuits for MEMS Microphones. In: van Roermund, A., Baschirotto, A., Steyaert, M. (eds) Nyquist AD Converters, Sensor Interfaces, and Robustness. Springer, New York, NY. https://doi.org/10.1007/978-1-4614-4587-6_9

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  • DOI: https://doi.org/10.1007/978-1-4614-4587-6_9

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