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Delaminated Film Buckling Microchannels

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Mechanical Self-Assembly

Abstract

This chapter describes the method of manufacturing microfluidic microchannels formed by delaminated buckled thin films. Thin films under compression tend to delaminate and buckle. Microchannel geometry can be controlled by tailoring film residual stress and placing patterned adhesion-weakening layers utilizing photolithographic techniques. Results based on the photoresist as the adhesion weakening layer and compressed tungsten thin films are described along with the corresponding thin film mechanics.

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Authors and Affiliations

  1. Department of Mechanical Engineering, University of South Florida, 4202 E Fowler Ave ENB118, Tampa, FL, 33620, USA

    Alex A. Volinsky & Patrick Waters

Authors
  1. Alex A. Volinsky
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  2. Patrick Waters
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Corresponding author

Correspondence to Alex A. Volinsky .

Editor information

Editors and Affiliations

  1. , Dept. of Earth and Environmental Eng., Columbia University, West 120th Street 500, New York, 10027, New York, USA

    Xi Chen

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Volinsky, A.A., Waters, P. (2013). Delaminated Film Buckling Microchannels. In: Chen, X. (eds) Mechanical Self-Assembly. Springer, New York, NY. https://doi.org/10.1007/978-1-4614-4562-3_8

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  • DOI: https://doi.org/10.1007/978-1-4614-4562-3_8

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  • Publisher Name: Springer, New York, NY

  • Print ISBN: 978-1-4614-4561-6

  • Online ISBN: 978-1-4614-4562-3

  • eBook Packages: EngineeringEngineering (R0)

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