Buckling Delamination of Compressed Thin Films
The aim of this chapter is to review the studies on buckle delamination in compressively stressed thin films over substrates by pulling together experimental and theoretical analysis. The general phenomena shown in delamination buckles of compressively stressed films were discussed from the onset to propagation over the substrates. The experimental observations were characterized by the delamination conditions and buckle morphologies. Then, the related mechanics for buckle delamination were provided with a theoretical solution for simple buckle configurations and a numerical solution for nonlinear buckle. Based on the experimental and theoretical analysis, the buckle configuration was applied to fluidic channels by precisely controlling buckle width within the desired area by adjusting interface adhesion.
KeywordsEnergy Release Rate Curve Front Interface Toughness Interface Fracture Toughness Nonlinear Buckle
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