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Stiction Failure in Microswitches Due to Elasto-Plastic Adhesive Contacts

Conference paper
Part of the Conference Proceedings of the Society for Experimental Mechanics Series book series (CPSEMS)

Abstract

Undesirable stiction, which results from the contact between surfaces, is a major failure mode in micro-switches. Indeed the adhesive forces can become so important that the two surfaces remain permanently glued, limiting the life-time of the MEMS. This is especially true when the contact happens between surfaces where elasto-plastic asperities deform permanently until the surfaces reach plastic accommodation, increasing the surface forces. To predict this behavior, a micro adhesive-contact model is developed, which accounts for the surfaces topography evolutions during elasto-plastic contacts. This model can be used at a higher scale to study the MEMS behavior, and thus its life-time. The MEMS devices studied here are assumed to work in a dry environment. In these operating conditions only the Van der Waals forces have to be considered for adhesion. For illustration purpose, an electrostatic-structural analysis is performed on a micro-switch. To determine the degree of plasticity involved, the impact energy of the movable electrode at pull-in is estimated. Thus the maximal adhesive force is predicted using the developed model.

Keywords

Adhesion Effect Asperity Height Single Asperity Movable Electrode Plastic Accommodation 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© The Society for Experimental Mechanics 2013

Authors and Affiliations

  1. 1.Aerospace and Mechanical Engineering DepartmentUniversity of LiegeLiègeBelgium
  2. 2.School of AeronauticsNorthwestern Polytechnical UniversityXi’anChina

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