This work presents the development of a “all-solid state” integrated reference electrode based on a PVC membrane doped with lipophilic salts (tetrabutylammonium tetrabutylborate (TBA-TBB) and Potassium tetrakis (4-chlorphenyl)borate (KTClpB)) for the integration with ISFETs sensors using a Si3N4 dielectric as sensitive material. The described system is intended for the implementation of fully integrated large sensor arrays for high throughput cell assays. Electrode preparation and evaluation of potential stability to pH is described, demonstrating the suitability of the approach.
SiO2 Epoxy Borate Encapsulation Diamine
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