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Sensors pp 445-448 | Cite as

Thin Film Humidity Sensor Based on Sol–Gel Technology

  • Giovanni Betta
  • Serena Esposito
  • Marco Laracca
  • Michele Pansini
Conference paper
Part of the Lecture Notes in Electrical Engineering book series (LNEE, volume 162)

Abstract

In different technical fields the existence of low cost sensors to be able to measure both humidity and gas in environmental pollution applications is an increasing need. The paper proposes a first step in the realization of an integrated sensor able to give a possible response to this aim. Using the sol–gel technology, a novel resistive humidity sensor based on cobalt doped silica thin film deposited on a quartz support is proposed.

Keywords

Humidity Sensor Thin Film Thickness Agilent Technology 3458A High Chemical Affinity White Chamber 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

References

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Copyright information

© Springer Science+Business Media New York 2014

Authors and Affiliations

  • Giovanni Betta
    • 1
  • Serena Esposito
    • 2
  • Marco Laracca
    • 1
  • Michele Pansini
    • 2
  1. 1.DIEIUniversity of CassinoCassinoItaly
  2. 2.DICEMUniversity of CassinoCassinoItaly

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