Sensors pp 445-448 | Cite as

Thin Film Humidity Sensor Based on Sol–Gel Technology

  • Giovanni Betta
  • Serena Esposito
  • Marco Laracca
  • Michele Pansini
Conference paper
Part of the Lecture Notes in Electrical Engineering book series (LNEE, volume 162)


In different technical fields the existence of low cost sensors to be able to measure both humidity and gas in environmental pollution applications is an increasing need. The paper proposes a first step in the realization of an integrated sensor able to give a possible response to this aim. Using the sol–gel technology, a novel resistive humidity sensor based on cobalt doped silica thin film deposited on a quartz support is proposed.


Humidity Sensor Thin Film Thickness Agilent Technology 3458A High Chemical Affinity White Chamber 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


  1. 1.
    Yamazoe N, Shimizu Y (1986) Humidity sensors: principles and applications. Sens Actuator 10:379–398CrossRefGoogle Scholar
  2. 2.
    Kulwicki BM (1991) Humidity sensors. J Am Ceram Soc 74:697–708CrossRefGoogle Scholar
  3. 3.
    Traversa E (1995) Ceramic sensors for humidity detection: the state-of-art and future developments. Sens Actuator B Chem 23:135–156CrossRefGoogle Scholar
  4. 4.
    Corres JM, Matias IR, Hernaez M, Bravo J, Arregui FJ (2008) Optical fiber humidity sensors using nanostructured coatings of SiO2 nanoparticles. IEEE Sens J 8(3):281–285CrossRefGoogle Scholar
  5. 5.
    Sen AK, Darabi J (2008) Modeling and optimization of a microscale capacitive humidity sensor for HVAC applications. IEEE Sens J 8(4):333–340CrossRefGoogle Scholar
  6. 6.
    Betta G, Esposito S, Laracca M, Pansini M (2008) A novel sol–gel-based sensor for humidity detection. In: Proceedings of the 16th IMEKO TC4 symposium, Firenze, 22–24 Sept 2008Google Scholar
  7. 7.
    Esposito S, Setaro A, Maddalena P, Aronne A, Pernice P, Laracca M (2011) Synthesis of cobalt doped silica thin film for low temperature optical gas sensor. J Sol–gel Sci Technol, Springer 60(3):388–394Google Scholar

Copyright information

© Springer Science+Business Media New York 2014

Authors and Affiliations

  • Giovanni Betta
    • 1
  • Serena Esposito
    • 2
  • Marco Laracca
    • 1
  • Michele Pansini
    • 2
  1. 1.DIEIUniversity of CassinoCassinoItaly
  2. 2.DICEMUniversity of CassinoCassinoItaly

Personalised recommendations