Thin Film Humidity Sensor Based on Sol–Gel Technology
In different technical fields the existence of low cost sensors to be able to measure both humidity and gas in environmental pollution applications is an increasing need. The paper proposes a first step in the realization of an integrated sensor able to give a possible response to this aim. Using the sol–gel technology, a novel resistive humidity sensor based on cobalt doped silica thin film deposited on a quartz support is proposed.
KeywordsHumidity Sensor Thin Film Thickness Agilent Technology 3458A High Chemical Affinity White Chamber
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