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Sensors pp 299-303 | Cite as

Theoretical Investigation of the Temperature and Pressure Behavior of SAW and Lamb Waves Propagating Along 3C-SiC/AlN

Conference paper
Part of the Lecture Notes in Electrical Engineering book series (LNEE, volume 162)

Abstract

The propagation of surface acoustic waves (SAW) and Lamb waves travelling along 3C-SiC/c-AlN multilayers is investigated by theoretical calculation with respect to the AlN and SiC thickness and acoustic wave propagation direction. The pressure and temperature effects on the phase velocity have been studied in order to go insight the design tradeoff of temperature compensated microwave devices for pressure sensing applications.

Keywords

Surface Acoustic Wave Lamb Wave Electromechanical Coupling Coefficient Acoustic Wave Velocity Lamb Mode 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media New York 2014

Authors and Affiliations

  1. 1.Istituto dei Sistemi ComplessiISC-CNRRomeItaly

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