Sensors pp 299-303 | Cite as

Theoretical Investigation of the Temperature and Pressure Behavior of SAW and Lamb Waves Propagating Along 3C-SiC/AlN

Conference paper
Part of the Lecture Notes in Electrical Engineering book series (LNEE, volume 162)


The propagation of surface acoustic waves (SAW) and Lamb waves travelling along 3C-SiC/c-AlN multilayers is investigated by theoretical calculation with respect to the AlN and SiC thickness and acoustic wave propagation direction. The pressure and temperature effects on the phase velocity have been studied in order to go insight the design tradeoff of temperature compensated microwave devices for pressure sensing applications.


Surface Acoustic Wave Lamb Wave Electromechanical Coupling Coefficient Acoustic Wave Velocity Lamb Mode 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


  1. 1.
    Levinshteĭn ME, Rumyantsev SL, Shur M (2001) Properties of advanced semiconductor materials: GaN, AlN, InN, BN, SiC, SiGe. Wiley, New YorkGoogle Scholar
  2. 2.
    Chih-Ming Lin, Yung-Yu Chen, Valery V. Felmetsger, Debbie G. Senesky, and Albert P. Pisano (2012) AlN/3C-SiC composite plate enabling high-frequency and high-Q micromechanical resonators. Adv Mater 24:2722–2727Google Scholar
  3. 3.
    Landolt-Börnstein (1979) Group III, vol 11, Springer, BerlinGoogle Scholar
  4. 4.
    Li Z, Bradt RC (1988) The Single Crystal Elastic Constants of Hexagonal SiC to 1000°C, Int. J. High Technol. Ceram 4:1–10Google Scholar
  5. 5.
    Adler EL, Farnell GW, Slaboszewicz J, Jen CK (1982) In: Proceedings of the IEEE ultrasonics symposium, San Diego (IEEE, New York, 1982), p 103Google Scholar
  6. 6.
    Lepkowski SP, Majewski, J (2005) Nonlinear elasticity in III-N compounds: Ab initio calculations. Phys Rev B 72:245–201Google Scholar
  7. 7.
    Prikhodko M, Miao MS, Lambrecht WRL (2002) Pressure dependence of sound velocities in 3C-SiC and their relation to the high-pressure phase transition. Phys Rev B 66:125–201Google Scholar

Copyright information

© Springer Science+Business Media New York 2014

Authors and Affiliations

  1. 1.Istituto dei Sistemi ComplessiISC-CNRRomeItaly

Personalised recommendations