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Sensors pp 145-148 | Cite as

Advances in the Definition of a Drop-Based Functionalization Protocol for CMOS-Compatible MEMS Biosensors

  • R. Pilolli
  • N. Ucciferri
  • V. Russino
  • N. Ditaranto
  • L. Tedeschi
  • N. Cioffi
  • C. Domenici
  • A. Nannini
  • F. Pieri
Conference paper
Part of the Lecture Notes in Electrical Engineering book series (LNEE, volume 162)

Abstract

Smart, MEMS-based biosensors are a promising new platform for the delivery of diagnostic services, but inclusion of on-chip CMOS electronics requires the definition a CMOS compatible techniques for the bio-activation of the sensor surface. In this work, a comparison between a sensor functionalization procedure by complete immersion of the sensor chip or by exposure to a single drop of the reagents (the latter approach being more compatible with the presence of on-chip CMOS components) is presented.

Keywords

Silicon Chip Diagnostic Service Resonant Sensor Bioactive Surface Complete Immersion 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media New York 2014

Authors and Affiliations

  • R. Pilolli
    • 1
  • N. Ucciferri
    • 2
  • V. Russino
    • 3
  • N. Ditaranto
    • 1
  • L. Tedeschi
    • 2
  • N. Cioffi
    • 1
  • C. Domenici
    • 2
  • A. Nannini
    • 3
  • F. Pieri
    • 3
  1. 1.Dipartimento di ChimicaUniversità di BariBariItaly
  2. 2.Istituto di Fisiologia ClinicaCNRPisaItaly
  3. 3.Dipartimento di Ingegneria dell’InformazioneUniversità di PisaPisaItaly

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