Advances in the Definition of a Drop-Based Functionalization Protocol for CMOS-Compatible MEMS Biosensors
Smart, MEMS-based biosensors are a promising new platform for the delivery of diagnostic services, but inclusion of on-chip CMOS electronics requires the definition a CMOS compatible techniques for the bio-activation of the sensor surface. In this work, a comparison between a sensor functionalization procedure by complete immersion of the sensor chip or by exposure to a single drop of the reagents (the latter approach being more compatible with the presence of on-chip CMOS components) is presented.
KeywordsSilicon Chip Diagnostic Service Resonant Sensor Bioactive Surface Complete Immersion
- 4.Cho SM, Ko S-Ch, Ha S-Ch, Kim Y-Sh, Kim YJ, Yang Y, Pyo H-Bo, Choi Ch-A (2005) IEEE Sens, Irvine, 30 Oct–3 Nov 2005Google Scholar