Sensors pp 145-148 | Cite as

Advances in the Definition of a Drop-Based Functionalization Protocol for CMOS-Compatible MEMS Biosensors

  • R. Pilolli
  • N. Ucciferri
  • V. Russino
  • N. Ditaranto
  • L. Tedeschi
  • N. Cioffi
  • C. Domenici
  • A. Nannini
  • F. Pieri
Conference paper
Part of the Lecture Notes in Electrical Engineering book series (LNEE, volume 162)

Abstract

Smart, MEMS-based biosensors are a promising new platform for the delivery of diagnostic services, but inclusion of on-chip CMOS electronics requires the definition a CMOS compatible techniques for the bio-activation of the sensor surface. In this work, a comparison between a sensor functionalization procedure by complete immersion of the sensor chip or by exposure to a single drop of the reagents (the latter approach being more compatible with the presence of on-chip CMOS components) is presented.

Keywords

H2O2 Dioxide FITC 

References

  1. 1.
    Grayson ACR, Shawgo RS, Johnson AM, Flynn NT, Yawen Li, Cima MJ, Langer R (2004) A BioMEMS review: MEMS technology for physiologically integrated devices. Proc IEEE 92(1):6–21CrossRefGoogle Scholar
  2. 2.
    Espinosa E, Ionescu R, Zampolli S, Elmi I, Cardinali GC, Abad E, Leghrib R, Ramírez JL, Vilanova X, Llobet E (2010) Drop-coated sensing layers on ultra low power hotplates for an RFID flexible tag microlab. Sens Actuat B Chem 144:462–466CrossRefGoogle Scholar
  3. 3.
    Ivanov P, Laconte J, Raskin JP, Stankova M, Sotter E, Llobet E, Vilanova X, Flandre D, Correig X (2005) SOI-CMOS compatible low-power gas sensor using sputtered and drop-coated metal-oxide active layers. Microsyst Technol 12:160–168CrossRefGoogle Scholar
  4. 4.
    Cho SM, Ko S-Ch, Ha S-Ch, Kim Y-Sh, Kim YJ, Yang Y, Pyo H-Bo, Choi Ch-A (2005) IEEE Sens, Irvine, 30 Oct–3 Nov 2005Google Scholar
  5. 5.
    Paci D, Pieri F, Toscano P, Nannini A (2008) A CMOS-compatible, magnetically actuated resonator for mass sensing applications. Sens Actuat B Chem 129:10–17CrossRefGoogle Scholar
  6. 6.
    Lenci S, Tedeschi L, Pieri F, Domenici C (2011) UV lithography-based protein patterning on silicon: Towards the integration of bioactive surfaces and CMOS electronics. Appl Surf Sci 20:8413–8419CrossRefGoogle Scholar
  7. 7.
    Tedeschi L, Citti L, Domenici C (2005) An integrated approach for the design and synthesis of oligonucleotide probes and their interfacing to a QCM-based RNA biosensor. Biosens Bioelectron 20:2376–2385CrossRefGoogle Scholar

Copyright information

© Springer Science+Business Media New York 2014

Authors and Affiliations

  • R. Pilolli
    • 1
  • N. Ucciferri
    • 2
  • V. Russino
    • 3
  • N. Ditaranto
    • 1
  • L. Tedeschi
    • 2
  • N. Cioffi
    • 1
  • C. Domenici
    • 2
  • A. Nannini
    • 3
  • F. Pieri
    • 3
  1. 1.Dipartimento di ChimicaUniversità di BariBariItaly
  2. 2.Istituto di Fisiologia ClinicaCNRPisaItaly
  3. 3.Dipartimento di Ingegneria dell’InformazioneUniversità di PisaPisaItaly

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