A Planar Integrated Micro-mass Spectrometer

  • Jörg Müller
  • Grigoriy Quiring
  • Maria Reinhardt-Szyba
  • Régulo Miguel Ramírez Wong
  • Henning Wehrs
Chapter

Abstract

A planar fully integrated micro-mass spectrometer fabricated in a full wafer based state-of-the-art MEMS technology in a glass–silicon–glass sandwich is presented. Within a volume of 7 × 10 × 1.3 mm³ it contains all components of a mass spectrometer, i.e., a microwave plasma electron source for ionization, an ionization chamber, the electron and ion extraction, acceleration and focusing electrodes, a new type of mass separator, a Faraday detector as well as structures for the pressure management within the system for analyte, plasma gas, optics, and mass separation. Also a spring arrangement to insert a self-aligning and contacting microchannel plate (MCP) is included. The complete system is transferred from one single photolithographic mask layer into a 2 ½ dimensional structure in a silicon substrate by ICP-etching. The designs of the subsystems, especially that of a new type of separation principle, are presented and the layout of the injection system and the batch processing of the device are outlined. A completely newly developed hardware and software of the electronics to drive the system is presented including its physical layout and operational scheme. Actual spectra obtained with the system demonstrate a mass resolution of 43 in a mass range of 0.5–200 and a sensitivity of <100 ppm. Means to adapt the size of the periphery like vacuum pumps, inlet pressure stages, and handling of liquid analytes, which would allow for a really handheld device, conclude the contribution.

Keywords

Burning Titanium Nickel Methane Microwave 

Notes

Acknowledgment

This work was funded and supported by several organizations and scientific as well as industrial partners for more than a decade. A number of PhD students, and many Diploma and Master students worked on this subject. It was funded by the City of Hamburg, the German Research Council (DFG), the European Union as well as the German Ministry of Research and Development; scientific partners were LETI and industrial partners Leda Mass, now part of MKS, Bayer Technology Services, and Krohne Messtechnik. PhD students besides the coauthors were Volker Relling, Ralph Siebert, Gerald Petzold, Jan-Peter Hauschild, and Eric Wapelhorst. Neither the PhD students nor the funders ever lost their confidence that finally we would succeed in realizing such a complex and fully integrated mass spectrometer.

Finally we appreciate the critical reading of the text by Winfred Kuipers.

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Copyright information

© Springer Science+Business Media, LLC 2012

Authors and Affiliations

  • Jörg Müller
    • 1
  • Grigoriy Quiring
    • 1
  • Maria Reinhardt-Szyba
    • 1
  • Régulo Miguel Ramírez Wong
    • 1
  • Henning Wehrs
    • 1
  1. 1.Institute for Microsystem TechnologyHamburg University of TechnologyHamburgGermany

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