Towards MEMS Fabrication by Silicon Electrochemical Micromachining Technology
In this work, fabrication of Micro Electromechanical Systems (MEMSs) by silicon Electrochemical Micromachining (ECM) technology is demonstrated. High aspect-ratio MEMS structures, with different shape and dimension, consisting of inertial free-standing masses equipped with comb-fingers and suspended by springs from the substrate were fabricated by exploiting advanced features of the ECM technology. ECM fabrication of MEMS structures is here investigated and discussed.
KeywordsEtching Depth Anisotropic Phase Electrochemical Micromachining Etched Structure Actuation Spring