Towards MEMS Fabrication by Silicon Electrochemical Micromachining Technology

Conference paper
Part of the Lecture Notes in Electrical Engineering book series (LNEE, volume 109)

Abstract

In this work, fabrication of Micro Electromechanical Systems (MEMSs) by silicon Electrochemical Micromachining (ECM) technology is demonstrated. High aspect-ratio MEMS structures, with different shape and dimension, consisting of inertial free-standing masses equipped with comb-fingers and suspended by springs from the substrate were fabricated by exploiting advanced features of the ECM technology. ECM fabrication of MEMS structures is here investigated and discussed.

Keywords

Porosity Dioxide Anisotropy Trench Serpentine 

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Copyright information

© Springer Science+Business Media, LLC 2012

Authors and Affiliations

  1. 1.Dipartimento di Ingegneria dell’informazione: Elettronica, Informatica, TelecomunicazioniPisaItaly

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