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Towards MEMS Fabrication by Silicon Electrochemical Micromachining Technology

  • M. Bassu
  • L. M. Strambini
  • G. Barillaro
Conference paper
Part of the Lecture Notes in Electrical Engineering book series (LNEE, volume 109)

Abstract

In this work, fabrication of Micro Electromechanical Systems (MEMSs) by silicon Electrochemical Micromachining (ECM) technology is demonstrated. High aspect-ratio MEMS structures, with different shape and dimension, consisting of inertial free-standing masses equipped with comb-fingers and suspended by springs from the substrate were fabricated by exploiting advanced features of the ECM technology. ECM fabrication of MEMS structures is here investigated and discussed.

Keywords

Etching Depth Anisotropic Phase Electrochemical Micromachining Etched Structure Actuation Spring 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

References

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Copyright information

© Springer Science+Business Media, LLC 2012

Authors and Affiliations

  1. 1.Dipartimento di Ingegneria dell’informazione: Elettronica, Informatica, TelecomunicazioniPisaItaly

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