Towards MEMS Fabrication by Silicon Electrochemical Micromachining Technology

  • M. Bassu
  • L. M. Strambini
  • G. Barillaro
Conference paper
Part of the Lecture Notes in Electrical Engineering book series (LNEE, volume 109)


In this work, fabrication of Micro Electromechanical Systems (MEMSs) by silicon Electrochemical Micromachining (ECM) technology is demonstrated. High aspect-ratio MEMS structures, with different shape and dimension, consisting of inertial free-standing masses equipped with comb-fingers and suspended by springs from the substrate were fabricated by exploiting advanced features of the ECM technology. ECM fabrication of MEMS structures is here investigated and discussed.


Etching Depth Anisotropic Phase Electrochemical Micromachining Etched Structure Actuation Spring 
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  1. 1.
    Barillaro G, Bruschi P, Diligenti A, Nannini A (2005) Fabrication of regular silicon microstructures by photoelectrochemical etching of silicon. Phys Stat Sol (c) 2:3198–3202CrossRefGoogle Scholar
  2. 2.
    Barillaro G, Nannini A, Piotto M (2002) Electrochemical etching in HF solution for silicon micromachining. Sensor Actuat A 102:195–201CrossRefGoogle Scholar
  3. 3.
    Barillaro G, Diligenti A, Benedetti M, Merlo S (2006) Silicon micromachined periodic structures for optical applications at λ = 1.55 μm. Appl Phys Lett 89:151110CrossRefGoogle Scholar
  4. 4.
    Zhang ZL, MacDonald NC (1992) A RIE process for submicron, silicon electromechanical structures. J Micromech Microeng 2:31–38CrossRefGoogle Scholar
  5. 5.
    Lai SL, Johnson D, Westerman R (2006) Aspect ratio dependent etching lag reduction in deep silicon etch processes. J Vac Sci Technol A 24:1283–1288CrossRefGoogle Scholar

Copyright information

© Springer Science+Business Media, LLC 2012

Authors and Affiliations

  1. 1.Dipartimento di Ingegneria dell’informazione: Elettronica, Informatica, TelecomunicazioniPisaItaly

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