Abstract
In this work, the mass response of a resonant, CMOS (Complementary MOS) compatible MEMS sensor, oriented at the detection of diagnostic markers, is presented. The sensor is fabricated with a MEMS (Micro-electro-mechanical System) post-processing method on a standard, CMOS-based VLSI technology, retaining maximum compatibility with the CMOS process flow. The mechanical resonator is based on inductive actuation and detection, and the sensing is based on the microbalance principle. A protocol for covalent bonding of organo-functional silanes (to be used as link sites for biomolecular probes) on the resonator surface is presented. The effect on the mechanical frequency response of a test mass attached to the surface is demonstrated by grafting of gold nanoparticles (NPs) to the amino-terminated surface silanes. The measured mass sensitivity compares favorably both with standard Quartz Crystal Microbalances (QCM) and with existing MEMS-based approaches.
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Acknowledgments
The authors thank STMicroelectronics for allowing access to the BCD6s technology. This work was partly financed by the Italian Ministry of Education, University and Research under a PRIN grant.
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Russino, V., Pieri, F., Nannini, A. (2012). Mass Response of A CMOS-Compatible, Magnetically Actuated MEMS Microbalance. In: D’Amico, A., Di Natale, C., Mosiello, L., Zappa, G. (eds) Sensors and Microsystems. Lecture Notes in Electrical Engineering, vol 109. Springer, Boston, MA. https://doi.org/10.1007/978-1-4614-0935-9_35
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DOI: https://doi.org/10.1007/978-1-4614-0935-9_35
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