Setting Up a 3D TCAD Simulation

Abstract

In order to perform a 3D TCAD simulation, we first need the mask layout for all the process steps. The mask layout can be designed in a variety of software including drafting tools like Autodesk AutoCAD^® and specialized EDA tools like Cadence Virtuoso^® and Tanner L-Edit^®. These tools are used to create a GDSII file (.gds) which is the current industry standard for IC layout work. The GDS format was originally developed by a California company called Calma for its layout design software, “Graphic Data System” (“GDS”) and later, “GDS II”. This format is now owned by Cadence Design Systems. Objects contained in a GDS II file are grouped by assigning them various attributes including layer number, data type or text type [52].