A nano-tensile tester for creep studies

  • L. I. J. C. Bergers
  • J. P. M. Hoefnagels
  • E. C. A. Dekkers
  • M. G. D. Geers
Conference paper
Part of the Conference Proceedings of the Society for Experimental Mechanics Series book series (CPSEMS)


Free-standing metallic thin films are increasingly used as structural components in MEMS. In commercial devices, long-term reliability is essential, which requires determining time-dependent mechanical properties of these films. The uniaxial tensile test is a preferred method due to uncomplicated determination of the stress and strain state. However, at the MEMS-scale this method is not straightforward: specimen handling and loading, force and deformation measurement need careful consideration. Here we discuss the challenges of the application and measurement of nano-Newton forces, nanometer deformations and micro-radians rotation alignment ensuring negligible bending in on-chip tensile test structures during long periods. We then present a novel tensile-testing instrument with in-situ capabilities in SEM and Optical Profilometry. The design solutions to measure these small forces and deformations whilst ensuring a uniaxial stress state will be presented.


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Copyright information

© Springer Science+Business Media, LLC 2011

Authors and Affiliations

  • L. I. J. C. Bergers
    • 1
    • 3
    • 4
  • J. P. M. Hoefnagels
    • 1
  • E. C. A. Dekkers
    • 2
  • M. G. D. Geers
    • 1
  1. 1.Dept. of Mech. Eng.Eindhoven Univ. of TechnologyEindhovenNL
  2. 2.Eindhoven Univ. of Technology, GTD.EindhovenNL
  3. 3.Foundation for Fundamental Research on MatterUtrechtNL
  4. 4.Materials innovation instituteDelftNL

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