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Superconducting NbN Film Treatments

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Advances in Cryogenic Engineering Materials

Part of the book series: Advances in Cryogenic Engineering ((ACRE,volume 30))

Abstract

To fabricate any cyroelectronic device based on the superconducting NbN film elements, one must carry out a number of technological processes, including several stages of superconducting material deposition on hot substrates, ion etching, and ion implantation. Changes in the superconducting properties of different NbN films after the ion implantation were investigated earlier.1 It was found that the ion implantation can cause sharp changes of Tc and hence can be applied as a method to determine the local characteristics of NbN films. Influences of heat treatment and ion etching on properties of NbN superconducting films are assumed to be unfavourable. So, the main purpose of this work is to study the changes of NbN film properties under different kinds of treatment and to determine how to form the initial film structure that will prevent their deterioration.

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References

  1. V. M. Pan et al., Cryogenics 23 (5): 258–262 (1983).

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Author information

Authors and Affiliations

  1. Institute of Metal Physics, Kiev, USSR

    V. M. Pan & A. G. Popov

  2. Kiev Polytechnical Institute, Kiev, USSR

    M. V. Belous & S. A. Koziychuk

Authors
  1. V. M. Pan
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  2. A. G. Popov
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  3. M. V. Belous
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  4. S. A. Koziychuk
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Editor information

Editors and Affiliations

  1. U.S. Department of Commerce, National Bureau of Standards, Boulder, Colorado, USA

    A. F. Clark  & R. P. Reed  & 

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© 1984 Springer Science+Business Media New York

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Pan, V.M., Popov, A.G., Belous, M.V., Koziychuk, S.A. (1984). Superconducting NbN Film Treatments. In: Clark, A.F., Reed, R.P. (eds) Advances in Cryogenic Engineering Materials . Advances in Cryogenic Engineering, vol 30. Springer, Boston, MA. https://doi.org/10.1007/978-1-4613-9868-4_63

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  • DOI: https://doi.org/10.1007/978-1-4613-9868-4_63

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4613-9870-7

  • Online ISBN: 978-1-4613-9868-4

  • eBook Packages: Springer Book Archive

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