X-Ray Spectral Measurement and Interpretation

  • E. Lifshin
  • M. F. Ciccarelli
  • R. B. Bolon


Chemical analysis in the scanning electron microscope and electron microprobe is performed by measuring the energy and intensity distribution of the x-ray signal generated by a focused electron beam. The subject of x-ray production has already been introduced in the chapter on electron beam-specimen interactions (Chapter III), which describes the mechanisms for both characteristic and continuum x-ray production. This chapter is concerned with the methods for detecting and measuring these signals as well as converting them into a useful form for qualitative and quantitative analysis.


Proportional Counter Solid State Detector Crystal Spectrometer Focus Electron Beam Counter Tube 
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Copyright information

© Plenum Press, New York 1975

Authors and Affiliations

  • E. Lifshin
    • 1
  • M. F. Ciccarelli
    • 1
  • R. B. Bolon
    • 1
  1. 1.General Electric Corporate Research and DevelopmentSchenectadyUSA

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