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X-Ray Spectral Measurement and Interpretation

  • E. Lifshin
  • M. F. Ciccarelli
  • R. B. Bolon

Abstract

Chemical analysis in the scanning electron microscope and electron microprobe is performed by measuring the energy and intensity distribution of the x-ray signal generated by a focused electron beam. The subject of x-ray production has already been introduced in the chapter on electron beam-specimen interactions (Chapter III), which describes the mechanisms for both characteristic and continuum x-ray production. This chapter is concerned with the methods for detecting and measuring these signals as well as converting them into a useful form for qualitative and quantitative analysis.

Keywords

Proportional Counter Solid State Detector Crystal Spectrometer Focus Electron Beam Counter Tube 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Plenum Press, New York 1975

Authors and Affiliations

  • E. Lifshin
    • 1
  • M. F. Ciccarelli
    • 1
  • R. B. Bolon
    • 1
  1. 1.General Electric Corporate Research and DevelopmentSchenectadyUSA

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