Abstract
Chemical analysis in the scanning electron microscope and electron microprobe is performed by measuring the energy and intensity distribution of the x-ray signal generated by a focused electron beam. The subject of x-ray production has already been introduced in the chapter on electron beam-specimen interactions (Chapter III), which describes the mechanisms for both characteristic and continuum x-ray production. This chapter is concerned with the methods for detecting and measuring these signals as well as converting them into a useful form for qualitative and quantitative analysis.
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References
C. F. Hendee, S. Fine, and W. B. Brown, Rev. Sci. Instr., 27, 531 (1956).
J. E. Holliday, in The Electron Microprobe (T. D. McKinley, K. F. J. Heinrich, and D. B. Wittry, eds.), Wiley New York (1963), p. 3.
R. Fitzgerald, K. Keil, and K. Heinrich, Science, 159, 528 (1968).
R. Woldseth, in X-Ray Energy Spectrometry, Kevex Corp., Burlingame (1973).
E. Lifshin and M. F. Ciccarelli, in SEM/1973 Proceedings of the 6th Annual SEM Symposium, (O. Johari, ed.), IITRI, Chicago, Illinois (1973), p. 89.
T. O. Ziebold, Anal. Chem., 39, 858 (1967).
L. V. Sutfin and R. E. Ogilvie, in Energy Dispersion X-Ray Analysis: X-Ray and Electron Probe Analysis (J. C. Russ, ed.), ASTM, Philadelphia, Pennsylvania (1971), p. 197.
N. C. Barbi, A. O. Sandborg, J. C. Russ, and C. E. Soderquist in SEM/197b Proceedings of the 7th Annual SEM Symposium, (O. Johari, ed.), IITRI, Chicago, Illinois (1974), p. 151.
N. G. Ware and S. J. B. Reed, J. Phys. E, 6, 286 (1973).
E. Lifshin, M. F. Ciccarelli and R. B. Bolon, in Proceedings Eighth National Conference on Electron Probe Analysis, New Orleans, (1973), p. 29.
H. A. Kramers, Phil. Mag., 46, 836 (1923).
H. Kulenkampff, Ann. Phys., 69, 548 (1922).
M. Green, Ph.D. Thesis, University of Cambridge (1962).
N. A. Dyson, Ph.D. Thesis, University of Cambridge (1956).
A. H. Compton and S. K. Allison, in X-Rays in Theory and Experiment, D. Van Nostrand, New York (1943), p. 106.
T. S. Rao-Sahib and D. B. Wittry, in Proceedings of the Sixth International Conference on X-Ray Optics and Microanalysis, (G. Shinoda, K. Kohra and T. Ichinokawa, eds.), University of Tokyo Press, Tokyo (1972), p. 131.
M. Green and V. E. Cosslett, J. Phys. E, 1, 425 (1968).
J. Henoc, in Quantitative Electron Probe Microanalysis, NBS Special Publication 298, Washington, D.C. (1968), p. 197.
G. Springer, N. Jb. Miner. Abh., 106, 241 (1967).
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© 1975 Plenum Press, New York
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Lifshin, E., Ciccarelli, M.F., Bolon, R.B. (1975). X-Ray Spectral Measurement and Interpretation. In: Goldstein, J.I., Yakowitz, H. (eds) Practical Scanning Electron Microscopy. Springer, Boston, MA. https://doi.org/10.1007/978-1-4613-4422-3_7
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DOI: https://doi.org/10.1007/978-1-4613-4422-3_7
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