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Electron Beam-Specimen Interaction

  • Chapter
Practical Scanning Electron Microscopy

Abstract

A large number of interactions occur when a focused electron beam impinges on a specimen surface. Among the signals produced are secondary electrons, backscattered electrons, characteristic and continuum x-rays, Auger electrons, and photons of various energies. These signals are obtained from specific emission volumes within the sample, and these emission volumes are strong functions of the electron beam energy E 0 and the atomic number of the specimen Z. In fact the resolution for a particular signal in the electron microprobe or scanning electron microscope is primarily determined by its excitation volume and not by the electron probe size. This chapter will discuss scattering and electron penetration in solids in order to provide a basis for understanding how the electron beam interacts with the sample. In addition we will discuss, in turn, each of the signals as well as the spatial resolution that can be obtained in these instruments.

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Authors and Affiliations

  1. Metallurgy and Materials Science Department, Lehigh University, Bethlehem, Pennsylvania, USA

    J. I. Goldstein

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  1. J. I. Goldstein
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Editors and Affiliations

  1. Metallurgy and Materials Science Department, Lehigh University, Bethlehem, Pennsylvania, USA

    Joseph I. Goldstein

  2. U.S Deparment of Commerce, National Bureau of Standards, Washington D.C., USA

    Harvey Yakowitz

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© 1975 Plenum Press, New York

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Goldstein, J.I. (1975). Electron Beam-Specimen Interaction. In: Goldstein, J.I., Yakowitz, H. (eds) Practical Scanning Electron Microscopy. Springer, Boston, MA. https://doi.org/10.1007/978-1-4613-4422-3_3

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  • DOI: https://doi.org/10.1007/978-1-4613-4422-3_3

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4613-4424-7

  • Online ISBN: 978-1-4613-4422-3

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