Abstract
The amount of current in a finely focused electron beam impinging on a specimen determines the magnitude of the signals (x-ray, secondary electrons, etc.) emitted, other things being equal. In addition, the size of the final probe spot determines the resolution of the scanning electron microscope (SEM) and electron microprobe (EPMA) for many mechanisms of contrast formation. Therefore, the electron optical system in these instruments is designed so that the maximum possible current is obtained in the smallest possible electron probe. In order to use the instruments intelligently, it is important to understand how the optical column is designed, how the various components of the optical system function, and which components are most important in determining the final current and spot size. In this chapter, we will discuss the various components of the electron optical system, develop the relationships between electron probe current and spot size, and discuss the factors which influence this relationship.
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© 1975 Plenum Press, New York
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Goldstein, J.I. (1975). Electron Optics. In: Goldstein, J.I., Yakowitz, H. (eds) Practical Scanning Electron Microscopy. Springer, Boston, MA. https://doi.org/10.1007/978-1-4613-4422-3_2
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DOI: https://doi.org/10.1007/978-1-4613-4422-3_2
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4613-4424-7
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