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Measurement of Thickness of Films and Platings

  • Eugene P. Bertin

Abstract

Actually, the x-ray spectrometer directly provides only two types of information about films and platings—composition (Section 14.7) and area density (mass thickness). Thickness is derived from these quantities indirectly and only after assumptions are made about the uniformity of the film thickness and about the actual densities of the film and the constituent elements in the film, as distinguished from bulk densities. Section 14.7 discusses x-ray spectrometric determination of film composition, particularly as a means of dealing with absorption-enhancement effects. This chapter discusses determination of film thickness (25j, B42, L27).

Keywords

Plate Thickness Primary Beam Plate Element Substrate Element Base Emission 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Plenum Press, New York 1975

Authors and Affiliations

  • Eugene P. Bertin
    • 1
  1. 1.RCA LaboratoriesDavid Sarnoff Research CenterPrincetonUSA

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