Ion Implantation in Piezoelectric Substrates

  • P. Hartemann
  • M. Morizot


The elastic and piezoelectric properties of substrates used in acoustic surface wave devices are changed by ion implantation as a consequence of the crystalline structure perturbation produced by ions.Quartz, lithium niobate, lithium tantalate and bismuth germanium oxide substrates were exposed to a beam of light ions. The influence of this bombardment on density, acoustic surface wave velocity, electromechanical coupling coefficient,static capacitance, d.c. conductivity and temperature coefficient of delay has been studied.

As examples of application, the density and velocity change induced by ion implantation is used for reflecting surface waves. Guides and resonators are realized by these technics.


Lithium Niobate Static Capacitance Electromechanical Coupling Coefficient Lithium Tantalate Interdigital Transducer 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.


  1. (1).
    T.R. Larson, W.H. Weisenberger and W.H. Lucke, Appl. Phys. Letters 22, 617 (1973)ADSCrossRefGoogle Scholar
  2. (2).
    P. Hartemann and M. Morizot, Electr. Lett. 9, 497 (1973)CrossRefGoogle Scholar
  3. (3).
    P. Hartemann, Electr. Lett. 10, 110 (1974)CrossRefGoogle Scholar
  4. (4).
    P. Hartemann, Ultrasonics Symposium Proceedings IEEE cat 75 CHO 994 4SU p. 303 (1975)Google Scholar

Copyright information

© Plenum Press, New York 1977

Authors and Affiliations

  • P. Hartemann
    • 1
  • M. Morizot
    • 1
  1. 1.Laboratoire Central de RecherchesTHOMSON-CSFOrsayFrance

Personalised recommendations