Ion Implantation in Piezoelectric Substrates
The elastic and piezoelectric properties of substrates used in acoustic surface wave devices are changed by ion implantation as a consequence of the crystalline structure perturbation produced by ions.Quartz, lithium niobate, lithium tantalate and bismuth germanium oxide substrates were exposed to a beam of light ions. The influence of this bombardment on density, acoustic surface wave velocity, electromechanical coupling coefficient,static capacitance, d.c. conductivity and temperature coefficient of delay has been studied.
As examples of application, the density and velocity change induced by ion implantation is used for reflecting surface waves. Guides and resonators are realized by these technics.
KeywordsQuartz Lithium Boron Helium Bismuth
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