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Swirls in Neutron-Transmutation Doped Float-Zoned Silicon

  • Horst G. Kramer

Abstract

Today, dislocation-free float-zoned ingots are routinely grown free of swirls. However, after neutron-transmutation doping and after annealing to restore electrical properties, these ingots may show swirls after preferential etching. Statistical evidence indicates that, if both oxygen and carbon are present in concentrations less than 1 ppma (5 × 1016 atoms/cm3), then it is oxygen that causes swirls to form. The lower threshold of oxygen for swirl formation appears to be 0.15 ppma. This hypothesis has been experimentally verified by adding small amounts of oxygen during regrowth to previously swirl-free neutron-transmutation doped ingots. A second round of irradiation and annealing then produced swirls in these ingots. The paper presents evidence that neither the zone refiner nor the zone-refining process induced swirls, so that the most likely source of the oxygen is the polycrystalline silicon itself.

Keywords

Oxygen Content Polycrystalline Silicon Ingot Surface Zone Refiner Preferential Etching 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Plenum Press, New York 1984

Authors and Affiliations

  • Horst G. Kramer
    • 1
  1. 1.Electronics DivisionMonsanto CompanySt. PetersUSA

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