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Silicon sensors meet integrated circuits

  • Phillip W. Barth

Abstract

This paper introduces some of the techniques used to create a sensing element as an integral part of a piece of silicon which may also contain integrated electronic circuitry for signal processing. The extremely small, relatively cheap sensors which can be made using these techniques have potential applications particularly in the field of medicine, where sensors implanted in the body can detect chemical and physical parameters for diagnosis and control of abnormal body functions. This article places some emphasis on the potential and problems of the technology for these in vivo applications.

Keywords

Silicon Wafer Pressure Sensor Sensor Fabrication Biomedical Sensor Capacitive Pressure Sensor 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Chapman & Hall 1990

Authors and Affiliations

  • Phillip W. Barth

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