Silicon sensors meet integrated circuits
This paper introduces some of the techniques used to create a sensing element as an integral part of a piece of silicon which may also contain integrated electronic circuitry for signal processing. The extremely small, relatively cheap sensors which can be made using these techniques have potential applications particularly in the field of medicine, where sensors implanted in the body can detect chemical and physical parameters for diagnosis and control of abnormal body functions. This article places some emphasis on the potential and problems of the technology for these in vivo applications.
KeywordsSilicon Wafer Pressure Sensor Sensor Fabrication Biomedical Sensor Capacitive Pressure Sensor
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