Abstract
Recently, Binnig, Quate, and Gerber developed the atomic force microscope (AFM), an instrument which senses minute (10-12 – 10-8 N) forces between a sharp tip and a sample surface [1], In addition to enabling the study of solid-solid interactions on a unprecedentedly small scale, the AFM provides a general method for doing non-destructive surface profilometry at a resolution better than 10 nm and perhaps down to the atomic level. In this paper we review the principles of the AFM, discuss its potential resolution and data rate, describe our new AFM design, and present some initial results. We have obtained three dimensional surface profiles with 20 nm lateral resolution, which to our knowledge is better than what has been attained previously by stylus profilometry.
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References
G. Binnig, C. F. Quate and Ch. Gerber, Phys. Rev. Lett. 12, 930 (1986).
G. Binnig and H. Rohrer, IBM J. Res. and Develop. 30, 355 (1986).
C. F. Quate, Physics Today 39, 26 (1986).
G. Binnig, H. Rohrer, Ch. Gerber and E. Weibel, Phys. Rev. Lett. 49, 57 (1982).
U. Dürig, J. K. Gimzewski, and D. W. Pohl, Phys. Rev. Letts., to be published.
E. C. Teague, F. E. Scire, S. M. Baker, and S.W. Jensen, Wear 83, 1 (1982).
J. M. Bennet and J. H. Dancy, Appl. Opt. 20, 1785 (1981).
G. S. Kino, P. C. D. Hobbs, and T. Corle, this volume; J. C. Wyant, C. L. Koliopoulos, B. Bhusan, and O. E. George, ASLE Trans. 27, 101 (1984).
U. Dürig, D. W. Pohl, and F. Rohner, J. Appl. Phys. 59+9, 3318 (1986).
C. F. Quate, Phys. Today 38, 34 (1985).
D. Tabor and R. H. S. Winterton, Proc. R. Soc. London A 312, 435 (1969).
See, for example, R. G. Horn and J. N. Israelachvili, J. Chem. Phys. 75, 1400 (1981).
A. W. Adamson, “Physical Chemistry of Surfaces,” Wiley, New York (1976).
J. N. Israelachvili, “Intermolecular and Surface Forces,” Academic Press, London (1985).
G. M. McClelland, to be published.
K. E. Peterson, Proc. IEEE, 70, 420 (1982).
S. Chiang and R. J. Wilson, IBM J. Res. and Develop. 30, Sept. (1986).
Ch. Gerber, G. Binnig, H. Fuchs, O. Marti, and H. Rohrer, Rev. Sci. Instrum. 57, 221 (1986).
R. Gomer, “Field Emission and Field Ionization,” Harvard University Press, Cambridge (1961).
E. W. Müller and T. T. Tsong, “Field Ion Microscopy, Principles and Applications,” Elsevier, New York (1969).
G. Binnig, H. Fuchs, Ch. Gerber, H. Rohrer, E. Stoll, and E. Tosatti, Europhys. Lett. 1, 31 (1986).
R. Sonnenfeld and P. K. Hansma, Science 232, 211 (1986).
S.-I. Park and C. F. Quate, Appl. Phys. Lett. 48, 112 (1986).
E. C. Teague, “Room Temperature Gold-Vacuum-Gold Tunneling Experiments,” University Microfilms International, Ann Arbor, Michigan (1978).
J. M. Soler, A. M. Baro, N. Garcia, and H. Rohrer, Phys. Rev. Lett. 57, 444 (1986).
R. J. Wilson and S. Chiang, to be published.
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McClelland, G.M., Erlandsson, R., Chiang, S. (1987). Atomic Force Microscopy: General Principles and a New Implementation. In: Thompson, D.O., Chimenti, D.E. (eds) Review of Progress in Quantitative Nondestructive Evaluation. Review of Progress in Quantitative Nondestructive Evaluation, vol 6 A. Springer, Boston, MA. https://doi.org/10.1007/978-1-4613-1893-4_148
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DOI: https://doi.org/10.1007/978-1-4613-1893-4_148
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