Skip to main content
SpringerLink
Log in

Preparation of a-Si and its Related Materials by Hydrogen Radical Enhanced CVD

  • Chapter
Disordered Semiconductors

Part of the book series: Institute for Amorphous Studies Series ((IASS))

Abstract

A novel method of preparing a-Si and its related materials from fluorides, i.e., Hydrogen Radical Enhanced CVD (HRCVD), is proposed. This method is based on control over the chemistry both in the gas phase and in the growing surface with the aid of hydrogen atoms.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
eBook
USD 16.99
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 109.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. W.E. Spear and P.G. Le Comber, Solid State Commun. 17 (1976) 1193.

    Article  ADS  Google Scholar 

  2. W.E. Spear and P.G. Le Comber, Phil. Mag. 33 (1976) 935.

    Article  ADS  Google Scholar 

  3. Semiconductors and Semimetals, Vol. 21, Part D, ed. J.I. Pankove, Academic Press (1984).

    Google Scholar 

  4. I. Shimizu, J. Non-Cryst. Solids 77 & 78 (1985) 1363.

    Google Scholar 

  5. H.F. Sterling and R.C.G. Swann, Solid State Elec. 8 (1965) 653.

    Article  ADS  Google Scholar 

  6. J.P.M. Schimitt, J. Non-Cryst. Solids 59 & 60 (1983) 649.

    Article  Google Scholar 

  7. E.A. Austin and F.W. Lampe, J. Phys. Chem. 81 (1977) 1134.

    Article  Google Scholar 

  8. D. Hauschildt, R. Fischer, and W. Fuhs, Phys. Status Solidi B 102 (1980) 563.

    Article  Google Scholar 

  9. N.V. Dong, T.H. Dhan, and J.Y. Leny, J. Appl. Phys. 52 (1981) 338.

    Article  ADS  Google Scholar 

  10. B. von Roedern, D.K. Paul, J. Blake, R.W. Collins, G. Moddel, and W. Paul, Phys. Rev. B 25 (1982) 7678.

    Article  ADS  Google Scholar 

  11. J. Bullot, M. Galin, M. Gauthier, and B. Bourdon, J. Phys. (Paris) 44 (1983) 713.

    Google Scholar 

  12. K.D. Mackenzie, J.R. Eggert, D.J. Leopold, Y.M. Li, Z.I. Sun, and W. Paul, Phys. Rev. B 31 (1985) 2198.

    Article  ADS  Google Scholar 

  13. K. Nozawa, Y. Yamaguchi, J. Hanna, and I. Shimizu, J. Non-Cryst. Solids 59 & 60 (1983) 533.

    Article  Google Scholar 

  14. S. Oda, Y. Yamaguchi, J. Hanna, S. Ishihara, R. Fujiwara, S. Kawate, and I. Shimizu, Technical Digest of International PVSEC-1, Kobe (1984) 429.

    Google Scholar 

  15. K.D. Mackenzie, J. Hanna, J.R. Eggert, V.M. Li, Z.I. Sun, and W. Paul, J. Non-Cryst. Solids 77 & 78 (1985) 881.

    Article  Google Scholar 

  16. S. Aljishi, ZE. Smith, D. Slobodin, J. Kolodzey, V. Chu, R. Schwarz, and S. Wagner, Proceedings of the Materials Research Society, Spring Meeting (1986).

    Google Scholar 

  17. S. Oda, S. Takagi, and I. Shimizu, Jpn. J. Appl. Phys. 25 (1986) 49.

    Article  ADS  Google Scholar 

  18. J. Hanna, N. Shibata, S. Oda, and I. Shimizu, Electrophotography 25 (1986) 24.

    Google Scholar 

  19. A. Madan, The Physics of Hydrogenated Amorphous Silicon II, ed. J.D. Joannopoulos and G. Lucovsky, Springer Verlag (1984) p. 245.

    Chapter  Google Scholar 

  20. S. Oda, S. Ishihara, N. Shibata, H. Shirai, A. Miyauchi, K. Fukuda, A. Tanabe, H. Ohtoshi, J. Hanna, and I. Shimizu, Jpn. J. Appl. Phys. 25 (1986) L188.

    Article  ADS  Google Scholar 

  21. S. Oda, S. Ishihara, N. Shibata, S. Takagi, H. Shirai, A. Miyauchi, and I. Shimizu, J. Non-Cryst. Solids 77 & 78 (1985) 877.

    Article  Google Scholar 

  22. J.W.C. Johns, A.W. Chantry, and R.F. Barrow, Trans. Faraday Soc. 54 (1985) 1580.

    Google Scholar 

  23. D.R. Rao and P. Venkateswarlu, J. Molecular Spectroscopy 7 (1967) 287.

    ADS  Google Scholar 

  24. M. Schmeisser and K.P. Ehlert, Angew. Chem. 203 (1962) 281.

    Google Scholar 

  25. P.L. Timms, R.A. Kent, T.C. Ehlert, and J.L. Margrave, J. Amer. Chem. Soc. 87 (1965) 2824.

    Article  Google Scholar 

  26. D.E. Nagle, R.S. Julian, and J.R. Zacharaias, Phys. Rev. 72 (1947) 971.

    Article  ADS  Google Scholar 

  27. H.P. Broida and L.W. Moyer, J. Opt. Soc. Amer. 42 (1952) 37.

    Article  ADS  Google Scholar 

  28. E.L. Tollefson and D.J. LeRoy, J. Chem. Phys. 16 (1948) 1057.

    Article  ADS  Google Scholar 

  29. H.W. Melville and J.C. Robb, Proceedings of the Roy. Soc. Ser. A 196 (1949) 445, 466, 479, 494.

    Article  Google Scholar 

  30. R.J. Cvetanovic and R.J. Cvetanovic, J. Chem. Phys. 35 (1961) 1233.

    Article  ADS  Google Scholar 

  31. J. Hanna, S. Oda, N. Shibata, H. Shirai, A. Miyauchi, A. Tanabe, K. Fukuda, H. Ohtoshi, O. Tokuhiro, H. Nguyen, and I. Shimizu, Proceedings of the Materials Research Society, Spring Meeting (1986).

    Google Scholar 

  32. I. Kato, S. Wakita, and S. Hara, Jpn. J. Appl. Phys. 22 (1983) L40.

    Article  ADS  Google Scholar 

  33. S.R. Ovshinsky and A. Madan, Nature (London) 276 (1978) 482.

    Article  ADS  Google Scholar 

  34. N. Shibata, A. Tanabe, J. Hanna, S. Oda, and I. Shimizu, Jpn. J. Appl. Phys. 25 (1986) L540.

    Article  ADS  Google Scholar 

  35. N. Shibata, K. Fukuda, H. Ohtoshi, J. Hanna, S. Oda, and I. Shimizu, to be published.

    Google Scholar 

  36. M. Matsuda, K. Yagi, M. Koyama, M. Toyama, Y. Imanishi, N. Ikuchi, and K. Tanaka, Appl. Phys. Lett. 47 (1985) 1061.

    Article  ADS  Google Scholar 

  37. N. Shibata, N. Shida, J. Hanna, S. Oda, and I. Zhimizu, to be published.

    Google Scholar 

  38. T. Tiedje, J.M. Cebulka, D.L. Morel, and B. Abel, Phys. Rev. Lett. 46 (1981) 1425.

    Article  ADS  Google Scholar 

  39. R.A. Street, J. Zesch, and M.J. Thompson, Appl. Phys. Lett. 43 (1983) 672.

    Article  ADS  Google Scholar 

  40. Y. Nakayama, K. Akiyama, N. Haga, and T. Kawamura, Jpn. J. Appl. Phys. 23 (1984) L70.

    Google Scholar 

  41. N. Shibata, A. Miyauchi, A. Tanabe, J. Hanna, S. Oda, and I. Shimizu, submitted to Jpn. J. Appl. Phys. (1986).

    Google Scholar 

  42. S. Guha, J. Non-Cryst. Solids 77 & 78 (1985) 1451.

    Article  Google Scholar 

  43. M.H. Cohen, H. Fritzsche, J. Singh, and F. Yonezawa, J. Phys. Soc. Japan 49 Supplement A (1980) 1175.

    Google Scholar 

  44. W.E. Spear, G. Willeke, and P.G. Le Comber, Physica 117B & 118B (1983) 908.

    Google Scholar 

  45. M. Janai, R. Weil, and B. Pratt, J. Non-Cryst. Solids 59 & 60 (1983) 734.

    Google Scholar 

  46. H. Matsumura, J. Non-Cryst. Solids 59 & 60 (1983) 739.

    Article  Google Scholar 

  47. C.J. Fang, L. Ley, K.J. Gruntz, H.R. Schanks, and M. Cardona, Phys. Rev. B 22 (1980) 6140.

    Article  ADS  Google Scholar 

  48. A. Madan, S.R. Ovshinsky, and E. Benn, Phil. Mag. 40 (1978) 259.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Tokyo Institute of Technology, The Graduate School at Nagatsuta, Midoriku, Yokohama 227, Japan

    Jun-ichi Hanna, Naoki Shibata, Kaichi Fukuda, Hirokazu Ohtoshi, Shunri Oda & Isamu Shimizu

  2. Imaging Science and Engineering Laboratory, Midoriku, Yokohama 227, Japan

    Jun-ichi Hanna

Authors
  1. Jun-ichi Hanna
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Naoki Shibata
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Kaichi Fukuda
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Hirokazu Ohtoshi
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Shunri Oda
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Isamu Shimizu
    View author publications

    You can also search for this author in PubMed Google Scholar

Editor information

Editors and Affiliations

  1. Massachusetts Institute of Technology, Cambridge, Massachusetts, USA

    Marc A. Kastner

  2. AT&T Bell Laboratories, Murray Hill, New Jersey, USA

    Gordon A. Thomas

  3. Energy Conversion Devices, Inc., Troy, Michigan, USA

    Stanford R. Ovshinsky

Rights and permissions

Reprints and permissions

Copyright information

© 1987 Plenum Press, New York

About this chapter

Cite this chapter

Hanna, Ji., Shibata, N., Fukuda, K., Ohtoshi, H., Oda, S., Shimizu, I. (1987). Preparation of a-Si and its Related Materials by Hydrogen Radical Enhanced CVD. In: Kastner, M.A., Thomas, G.A., Ovshinsky, S.R. (eds) Disordered Semiconductors. Institute for Amorphous Studies Series. Springer, Boston, MA. https://doi.org/10.1007/978-1-4613-1841-5_48

Download citation

  • DOI: https://doi.org/10.1007/978-1-4613-1841-5_48

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4612-9028-5

  • Online ISBN: 978-1-4613-1841-5

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics

Search

Navigation