Abstract

In previous chapters we considered the properties of polysilicon that make it useful in integrated circuits. In this chapter, we want to proceed further and discuss the applications of polysilicon explicitly. Because of the wide range of integrated-circuit devices in which polysilicon is now used, this discussion cannot be all inclusive. A few of the more important applications are considered in detail, and others are briefly mentioned.

Keywords

Phosphorus Silane Recombination Arsenic Boron 

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Copyright information

© Kluwer Academic Publishers 1988

Authors and Affiliations

  • Ted Kamins
    • 1
    • 2
  1. 1.Hewlett-PackardUSA
  2. 2.Stanford UniversityUSA

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