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Statistical Process Simulation

  • Stephen W. Director
  • Wojciech Maly
  • Andrzej J. Strojwas
Part of the The Kluwer International Series in Engineering and Computer Science book series (SECS, volume 86)

Abstract

In the last chapter we indicated that yield maximization methods, which take into account inherent fluctuations in the IC manufacturing process, must be supported by statistical process and device simulation. It will also be demonstrated in the following chapters of this book that such simulation is a necessary ingredient not only for circuit design but also for process and device development, as well as IC process diagnosis and control. This chapter describes the statistical process and device simulator FABRICS , which can mimic the stochastic nature of the manufacturing process. This simulator is based on concepts first proposed in [59], and then in [61, 65] and [83]. FABRICS consists of two major parts: a process simulator and a device simulator. The models implemented in FABRICS allow for the statistical simulation of typical semiconductor devices manufactured by a variety of fabrication processes.

Keywords

Threshold Voltage Process Engineer Device Model Device Simulator Impurity Profile 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 1.
    This section is based upon the paper ▪Statistical Simulation of IC Manufacturing Process▪ by W. Maly and A.J. Strojwas, IEEE Trans. on CARD, July 1982, Vo. CAD-1, No. 3, pp. 120-131Google Scholar
  2. 2.
    This section is based upon the paper ▪Modeling of Random Phenomena in CARD of IC % A Basic Theoretical Consideration▪ by W. Maly, Proceedings of ISCAS, pp. 427-430, 1985.Google Scholar
  3. 3.
    This section is based upon the paper ▪Parameters Extraction for Statistical Process Characterization▪ by C.J. Spanos and S.W. Director in IEEE Trans. on CAD, Vol. CAD-5, No. 1, pp. 66-78, 1986.Google Scholar
  4. 4.
    This section is based upon the paper ▪The Process Engineer’s Workbench▪ by A.J. Strojwas and S.W. Director, IEEE Journal of Solid-State Circuits, No.2, April, 1988, pp. 377-386.Google Scholar

Copyright information

© Kluwer Academic Publishers 1990

Authors and Affiliations

  • Stephen W. Director
    • 1
  • Wojciech Maly
    • 1
  • Andrzej J. Strojwas
    • 1
  1. 1.Carnegie Mellon UniversityUSA

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