Abstract
In many assembly and clean room applications it is desirable to continuously monitor fallout or sedimentation of large particles, typically greater than 5 microns in diameter. The accepted technique for monitoring sedimentation today is to collect particles on a witness plate and count them at periodic intervals. In many cases, however, it is important to observe sedimentation in real-time. For example, in a location where machinery operates, real-time monitoring can provide immediate warning of a problem.
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References
MIL-STD-1246A, “Product Cleanliness Levels and Contamination Control Program”.
W. C. Hinds, editor, “Aerosol Technology,” Chapter 3, Wiley Interscience, New York, 1982.
O. Hamberg and E. M. Shon, Particle size determination on surfaces in clean rooms, Proceedings of the Institute of Environmental Sciences Conference, May 1–3, 1984.
P. Borden, Y. Baron, and B. McGinley, Monitoring particles in vacuum-process equipment, Microcontamination, 30–34, October 1987.
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© 1989 Plenum Press, New York
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Borden, P.G., Munson, J., Bartelson, D.W. (1989). A Real-Time Fallout Monitor for 5–250 Micrometer Particles. In: Mittal, K.L. (eds) Particles in Gases and Liquids 1. Springer, Boston, MA. https://doi.org/10.1007/978-1-4613-0793-8_11
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DOI: https://doi.org/10.1007/978-1-4613-0793-8_11
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4612-8085-9
Online ISBN: 978-1-4613-0793-8
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