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Monitoring Contaminant Particles in Gases and Liquids: A Review

  • Douglas W. Cooper

Abstract

In the microelectronics and pharmaceutical industries especially, particles microns in size and even smaller diminish the quality and quantity of the products produced. To reduce losses due to contamination, we need to detect particles in air, in other gases, and in liquids, as well as on surfaces. Various methods are discussed here. The methods using the scattering of light predominate currently.

Keywords

Aerosol Particle Particle Counter Electrical Mobility Curve Pipe Microelectronic Industry 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Plenum Press, New York 1989

Authors and Affiliations

  • Douglas W. Cooper
    • 1
  1. 1.IBM Research DivisionT.J. Watson Research CenterUSA

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