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Development of Theoretical and Experimental Investigations of Thin Surface Structures by X-Ray Methods

  • I. A. Vartanyantz
  • A. Yu. Kazimirov
  • M. V. Kovalchuk
  • V. G. Kohn

Abstract

A new method of analysis of the curves of diffraction reflection from crystals with a disturbed surface layer has been developed. The method is based on a possibility to reconstruct the function, describing the crystal structure, with the aid of an inverse Fourier transformation. It allows to determine directly from experimental data the profile of deformation ∆d(z)/d and the degree of disorder exp(-W(Z))of the disturbed layer. The proposed method gives an opportunity to study the uniqueness of the solution thus obtained. The method is used to study a disturbed layer structure of silicon single crystals irradiated with boron ions.

Keywords

Inverse Fourier Transformation Scattered Radiation Diffusion Scattering Reflection Curve Diffraction Reflection 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Plenum Press, New York 1989

Authors and Affiliations

  • I. A. Vartanyantz
    • 1
  • A. Yu. Kazimirov
    • 1
  • M. V. Kovalchuk
    • 1
  • V. G. Kohn
    • 2
  1. 1.Institute of CrystallographyAcademy of Sciences of the USSRMoscowUSSR
  2. 2.I.V. Kurchatov Institute of Atomic EnergyMoscowUSSR

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