Development of Theoretical and Experimental Investigations of Thin Surface Structures by X-Ray Methods

  • I. A. Vartanyantz
  • A. Yu. Kazimirov
  • M. V. Kovalchuk
  • V. G. Kohn


A new method of analysis of the curves of diffraction reflection from crystals with a disturbed surface layer has been developed. The method is based on a possibility to reconstruct the function, describing the crystal structure, with the aid of an inverse Fourier transformation. It allows to determine directly from experimental data the profile of deformation ∆d(z)/d and the degree of disorder exp(-W(Z))of the disturbed layer. The proposed method gives an opportunity to study the uniqueness of the solution thus obtained. The method is used to study a disturbed layer structure of silicon single crystals irradiated with boron ions.


Inverse Fourier Transformation Scattered Radiation Diffusion Scattering Reflection Curve Diffraction Reflection 
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Copyright information

© Plenum Press, New York 1989

Authors and Affiliations

  • I. A. Vartanyantz
    • 1
  • A. Yu. Kazimirov
    • 1
  • M. V. Kovalchuk
    • 1
  • V. G. Kohn
    • 2
  1. 1.Institute of CrystallographyAcademy of Sciences of the USSRMoscowUSSR
  2. 2.I.V. Kurchatov Institute of Atomic EnergyMoscowUSSR

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