The Determination of Lattice Parameters and Strains in Stressed Thin Films Using X-Ray Diffraction: Extensions

  • E. L. Haase

Abstract

A method is presented that allows the simultaneous determination of the lattice parameters and the strains of stressed thin films. The method employs either a thin film Guinier camera or a diffractometer both with Seemann-Bohlin focussing. The generalization of the method for non-cubic system and samples having a Poisson ratio unequal to 1/3 is given. Applications are given for silver and gold films and several phases in the Nb-Ge system. A simplification of the method is given when only the lattice parameter is desired. Departures from linearity are discussed.

Keywords

Residual Stress Gold Film Silver Film Silver Powder Zeroth Iteration 
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References

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Copyright information

© Plenum Press, New York 1989

Authors and Affiliations

  • E. L. Haase
    • 1
  1. 1.Institut für Nukleare FestkörperphysikKernforschungszentrum KarlsruheKarlsruheFederal Republic of Germany

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