Kinematic Theory of X-Ray and Neutron Scattering by Defects in Thin Films and Surface Layers
The scattering by bounded defects in thin films and surface layers has been considered by the fluctuation waves method. It is shown that the finite crystal thickness and the relation of displacement fields near the surface affect substantially the intensity distribution at the reciprocal lattice points and lead to qualitative differences from the case of the homogeneous distribution of defects in massive crystals. In the case of free- or end-fixed thin films, the defects with small local distortions can broaden the Bragg peaks or lead to a very strong diffuse scattering the intensity of which is inversely proportional to the fourth power of the distance to the reciprocal lattice point.
KeywordsBragg Peak Static Displacement Diffuse Scattering Regular Reflection Free Film
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