Advertisement

Study of the Electron Transport in an RF Discharge in Ar and CH4/H2by Optical Emission Spectroscopy

  • F. Tochikubo
  • T. Kokubo
  • T. Makabe

Abstract

There are many theoretical and experimental studies of an electron swarm in a DC field. The time behavior of electron transport in an RF field is also studied from the Boltzmann equation (Winkler et al., 1985; Makabe and Goto, 1988). But we have few information about the electron transport in an RF discharge plasma, which is mainly used for plasma processing, because of the existence of the sheath and bulk region.

Keywords

Applied Voltage Optical Emission Spectroscopy Radiative Lifetime Bulk Region Excitation Rate 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. Makabe, T., and N. Goto, 1988, J. Phys. D 21, 887–95.Google Scholar
  2. Winkler, R. et al., 1985, Annalen der Physik 42, 537–58.Google Scholar

Copyright information

© Plenum Press, New York 1990

Authors and Affiliations

  • F. Tochikubo
    • 1
  • T. Kokubo
    • 1
  • T. Makabe
    • 1
  1. 1.Department of Electrical Engineering Faculty of Science and TechnologyKeio UniversityYokohama 223Japan

Personalised recommendations