Study of the Electron Transport in an RF Discharge in Ar and CH4/H2by Optical Emission Spectroscopy

  • F. Tochikubo
  • T. Kokubo
  • T. Makabe

Abstract

There are many theoretical and experimental studies of an electron swarm in a DC field. The time behavior of electron transport in an RF field is also studied from the Boltzmann equation (Winkler et al., 1985; Makabe and Goto, 1988). But we have few information about the electron transport in an RF discharge plasma, which is mainly used for plasma processing, because of the existence of the sheath and bulk region.

Keywords

Convolution 

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References

  1. Makabe, T., and N. Goto, 1988, J. Phys. D 21, 887–95.Google Scholar
  2. Winkler, R. et al., 1985, Annalen der Physik 42, 537–58.Google Scholar

Copyright information

© Plenum Press, New York 1990

Authors and Affiliations

  • F. Tochikubo
    • 1
  • T. Kokubo
    • 1
  • T. Makabe
    • 1
  1. 1.Department of Electrical Engineering Faculty of Science and TechnologyKeio UniversityYokohama 223Japan

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