Study of the Electron Transport in an RF Discharge in Ar and CH4/H2by Optical Emission Spectroscopy
There are many theoretical and experimental studies of an electron swarm in a DC field. The time behavior of electron transport in an RF field is also studied from the Boltzmann equation (Winkler et al., 1985; Makabe and Goto, 1988). But we have few information about the electron transport in an RF discharge plasma, which is mainly used for plasma processing, because of the existence of the sheath and bulk region.
KeywordsApplied Voltage Optical Emission Spectroscopy Radiative Lifetime Bulk Region Excitation Rate
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