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Growth Kinetics on Vicinal (001) Surfaces: The Solid-on-Solid Model of Molecular-Beam Epitaxy

  • D. D. Vvedensky
  • S. Clarke
  • K. J. Hugill
  • A. K. Myers-Beaghton
  • M. R. Wilby
Part of the NATO ASI Series book series (NSSB, volume 239)

Abstract

Growth kinetics during molecular-beam epitaxy (MBE) on vicinal surfaces are simulated with a kinetic solid-on-solid model. Comparison is made between the simulated step-density and the specular intensity of reflection high-energy electron-diffraction (RHEED) measurements. In addition to identifying the kinetic mechanisms giving rise to observed phenomena, this similarity provides considerable insight into the sensitivity of specular RHEED to specific features of morphological sensitivity involving two-point surface correlations. Applications of the model encompass both III-V and group-IV semiconductors. Examples for GaAs(001) MBE include: (i) a discussion of growth modes on vicinal surfaces as a function of substrate temperature, with (ii) a direct determination of model parameters from a comparison of step-density and RHEED evolutions; and (iii) the fabrication of quantum wires. For growth on Si(001) surfaces, we discuss (iv) the role of monatomic and biatomic steps and the dimer reconstruction in determining the mode of growth, and (v) the coverage of 2 × 1 and 1 × 2 domains during growth and after recovery.

Keywords

Step Edge Increase Substrate Temperature Vicinal Surface Step Density Monatomic Step 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Plenum Press, New York 1990

Authors and Affiliations

  • D. D. Vvedensky
    • 1
  • S. Clarke
    • 1
  • K. J. Hugill
    • 1
  • A. K. Myers-Beaghton
    • 1
  • M. R. Wilby
    • 1
  1. 1.The Blackett Laboratory and Indisciplinary Research Centre for Semiconductor MaterialsImperial CollegeLondonUK

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