Cryogenic Pressure Sensor Calibration Facility
Cold silicon piezoresistive strain gauge pressure sensors have several advantages over the conventional pressure measuring devices/systems used in cryogenics. A cryogenic pressure sensor calibration facility has been set up at Pressure Systems, Inc. for calibrating cryogenic pressure sensors in the temperature range 1.5 – 400 K. This paper presents a brief review of this calibration facility together with the low temperature characteristics of the cryogenic piezoresistive pressure sensors. The pressure sensors calibrated so far include 202 k Pa absolute (30 psia), 202 k Pa differential (30 psid) and 1013 k Pa absolute (150 psia) range devices. These calibrations are linear and are repeatable to within +/− 0.1% and +/− 0.5% full scale outputs for 202 k Pa and 1013 k Pa range pressure sensors respectively.
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