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Wavelength-Dispersive X-Ray Spectrometry and Microanalysis

  • Charles E. Lyman
  • Joseph I. Goldstein
  • Alton D. RomigJr.
  • Patrick Echlin
  • David C. Joy
  • Dale E. Newbury
  • David B. Williams
  • John T. Armstrong
  • Charles E. Fiori
  • Eric Lifshin
  • Klaus-Ruediger Peters

Abstract

This laboratory demonstrates the operation of a wavelength-dispersive x-ray spectrometer (WDS) fitted to a scanning electron microscope (SEM) or electron probe microanalyzer (EPMA). The WDS has important advantages over the energy-dispersive spectrometer (EDS) in terms of the peak-to-background ratio, improved elemental sensitivity, and better energy resolution of characteristic x-ray peaks to avoid peak overlaps. Comparisons of the major characteristics of the WDS and EDS detectors will be made. More detailed background information may be found in SEMXM, Chapters 5–8.

Keywords

Analyze Crystal Good Energy Resolution Stainless Steel Specimen High Beam Current Specimen Current 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Plenum Press, New York 1990

Authors and Affiliations

  • Charles E. Lyman
    • 1
  • Joseph I. Goldstein
    • 1
  • Alton D. RomigJr.
    • 2
  • Patrick Echlin
    • 3
  • David C. Joy
    • 4
  • Dale E. Newbury
    • 5
  • David B. Williams
    • 1
  • John T. Armstrong
    • 6
  • Charles E. Fiori
    • 5
  • Eric Lifshin
    • 7
  • Klaus-Ruediger Peters
    • 8
  1. 1.Lehigh UniversityBethlehemUSA
  2. 2.Sandia National LaboratoriesAlbuquerqueUSA
  3. 3.University of CambridgeCambridgeEngland
  4. 4.University of TennesseeKnoxvilleUSA
  5. 5.National Institute of Standards and TechnologyGaithersburgUSA
  6. 6.California Institute of TechnologyPasadenaUSA
  7. 7.GE Corporate Research and DevelopmentSchenectadyUSA
  8. 8.The University of Connecticut Health CenterFarmingtonUSA

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