Wavelength-Dispersive X-Ray Spectrometry and Microanalysis
This laboratory demonstrates the operation of a wavelength-dispersive x-ray spectrometer (WDS) fitted to a scanning electron microscope (SEM) or electron probe microanalyzer (EPMA). The WDS has important advantages over the energy-dispersive spectrometer (EDS) in terms of the peak-to-background ratio, improved elemental sensitivity, and better energy resolution of characteristic x-ray peaks to avoid peak overlaps. Comparisons of the major characteristics of the WDS and EDS detectors will be made. More detailed background information may be found in SEMXM, Chapters 5–8.
KeywordsAnalyze Crystal Good Energy Resolution Stainless Steel Specimen High Beam Current Specimen Current
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